Abstract
Plasma polymerization is a contactless coating method with monomers of polymers in a plasma discharge [1, 2]. The monomers polymerize in the plasma and are deposited on the substrate. Thin polymer coatings have other properties than polymer foils, which are manufactured by conventional methods, e.g. by evaporation of solvents from the polymer solution or by lamination from the polymer melt. A condition for this process is the presence of chain-forming atoms such as carbon, silicon or sulphur in the process gas. Since the monomer molecules are fractured in the plasma to reactive particles, the chemical structure of the outlet gas in the polymer coating remains at most partial, which entails crosslinking and unordered structuring.
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References
Hartmann R (1990) Beschichtung durch Plasmapolymerisation. TECHNIKA 19:151–154
Yasuda H (1981) Glow discharge polymerization. In: Journal of Polymer Science: Macromolecular Reviews 16:199–293
Linder EG, Davies AP (1931) J Phys Chem 35:3649
Gregor, L.V.: In: Physics of Thin Films. Ed: Thun, R. and G. Haas. New York, Academic Press 1065, Bd. 3 pp. 113
Holland L (1956) Vacuum Deposition of Thin Films. Chapman and Hull, London
Shen M (ed) (1976) Plasma Chemistry of Polymers. Marcel Deker,
Shen M, Bell AT (1979) Plasma Polymerization ACS Symposium Series, vol. 108.
Hollahan JR, Bell T (eds) (1974) Techniques and Applications of Plasma Chemistry. Wiley, New York
Poll HV, Tiller HJ, Wickleder KM (1978) Polymere dünne Schichten. In: Hamann G (ed) Organische Festkörper und anorganische dünne Schichten. Akademische Verlagsgesellschaft, Berlin, pp 399–490
Poll HV (1970) Zur Angew Phy 29:260
Kieser, J.: Plasmapolymerisation als industriell einsetzbare Technik. In: Plasmagestütztes Verfahren der Oberflächentechnik. Hrsg.: VDI-Technologiezentrum. VDI Verl. (1989), S. 106/131
Grünwald H (1992) Polymerisation zur Lösung von Adhäsionsproblemen. In: plasmatec ’92. Universität Duisburg,
Topics in Current Chemistry. Vol.89 und 90, Springer-Verl. 1980
Flis J, Mankowski J, Rolinski E (1989) Corrosion behaviour of stainless steel after plasma and ammoniac nitriding. Surface Engineering 5(2):151
Briglia T, Terwagne G, Bodart F, Quaeyhaegens C, D’Haen J, Stals LM (1996) Study of nitrogen-implanted stainless steels by CEMS and TEM. Surf Coat Technol 80:105–108
Berg M, Budtz-JÆrgensen CV, Reitz H, Schweitz KO, Chevallier J, KringhÆj P, BÆttiger J (2000) On plasma nitriding of steels. Surf Coat Technol 124:25–31
Kölbel J (1965) Die Nitridschichtbildung bei der Glimmentladung Forschungsbericht d. Landes Nordrhein-Westfalen, vol. 1555. , Köln
Dearnley PA, Namvar A, Hibberd GGA, Bell T (1989) Some observations on plasma nitriding austenitic stainless steel Proc. 1st Int. Conference on plasma surface engineering, Garmisch-Partenkirchen. DGM Informationsgesellschaft, Oberursel, p 219
Camps E, Muhl S, Romero S, Garcia JL (1998) Microwave plasma nitride austenitic AISI-304 stainless steel. Surf Coat Technol 106:121–128
Flis J, Mankowski J, Rolinski E (1989) Corrosion behaviour of stainless steel after plasma and ammoniac nitriding. Surface Engineering 5(2):151
Rie KT, Eisenberg S (1987) Mikrostruktur von Titan und Titanlegierungen. Härtereitechn Mitt 42(6):344–349
Rolinski E, Karpinski T (1987) Wear Restistance and Corrosion Behaviour of Plasma nitride Titanium Alloys. Proc. Of the Intern Seminar on Plasma Heat Treatment. , Senlis/Frankreich, pp 255–263
Souchard JP, Jacquot P, Coll B, Buvrun M (1990) Ionic Nitriding and Ionic Carburizing of pure Titanium and its Alloys. Proc of the 2nd Inter. Conf on Ion Nitriding and Ion Carburizing, Cincinnati, Ohio/USA, 1989. ASM,
Eisenberg S (1988) Plasmadiffusionbehandlung von Titan und Titanlegierungen. VDI-Verlag,
Suryanarayanan R (1993) Plasma Spraying: Theory and Applications. World Scientific Pub Co Inc., , p 211
Papyrin A, Kosarev V, Klinkov S, Alkhimov A, Fomin V (2007) Cold Spray Technology. Elsevier, Oxford
Lugscheider ER, Agethen R, Knepper M (1989) Löten von Keramik-Metall-Verbindungen durch Aufbringen von gradierten Zwischenschichten. Verbindungstechnik in der Elektrotechnik (2):82–85
Pawlowski L (1995) The Science and Technology of Thermal Spray Coatings. Wiley, New York
Steffens HD, Brandl W, Dvorak M, Wewel M, Rucinski D (1991) Vacuum Plasma and Vacuum Arc Sprayed Reactive Materials in Comparison. Proc. 2nd Plasma Technik Symposium, Luzern CH, pp 263–276
Jäger, D.: Spritztechnische Verarbeitung von Refraktärmaterialien und Refraktärhartstoffen für Korrosions- und Verschleißschutzanwendungen. Hrsg.: E. Lugscheider, Techn-Wissensch. Berichte Nr. 22.19.1.89 1989, RWTH Aachen
Wolf, P.C.: Neue Anwendungsgebiete des Plasmaspritzens in der Energietechnik. Wärme Bd. 89, Heft 3
Jäger, H., K. Schulze H. Frey: Preparation of YBa2Cu3O7–x Films by Low-Pressure RF-Plasma Deposition. J. of. The Less-Common Metals, 164 u. 165 (1990), pp. 486-492
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Frey, H. (2015). Plasma Treatment Methods. In: Frey, H., Khan, H.R. (eds) Handbook of Thin-Film Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-05430-3_7
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