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Basic Principle of Plasma Physics

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Handbook of Thin-Film Technology

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Abstract

Thin film technologies are generally based on plasma-supported methods (see Fig. 4.1). Plasma means:

- When in a liquid or a gas the number of free charge carriers is so large that charge carriers affect the physical properties of the medium substantially.

- When electromagnetic interactions between the charged particles take place.

- When the number of positive and negative charge carriers is for each unit of volume equally large in each case; the total quantity can be arbitrary.

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Authors
  1. Hartmut Frey Prof. Dr.
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Editors and Affiliations

  1. Esslingen, Germany

    Hartmut Frey Prof. Dr.

  2. Schwäbisch Gmünd, Germany

    Hamid R. Khan Prof. Dr.

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Frey, H. (2015). Basic Principle of Plasma Physics. In: Frey, H., Khan, H.R. (eds) Handbook of Thin-Film Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-05430-3_4

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