Abstract
A contactless method to determine the film thickness is the eddy current method, which can be used also for in-situ analysis [1]. An alternating primary magnetic field induces electric currents, so-called eddy currents in an electrical conductor. Their magnetic field is converse to the primary field. Its intensity depends, among other things, on the electrical conductivity of the material, in which the eddy currents are induced. Over the connection of the electrical conductivity of the film with the attenuation of the primary magnetic field the film thickness can be determined.
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Frey, H. (2015). Insitu Measurements. In: Frey, H., Khan, H.R. (eds) Handbook of Thin-Film Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-05430-3_11
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DOI: https://doi.org/10.1007/978-3-642-05430-3_11
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