We present a methodology and computational environment for applying mathematical model order reduction (MOR) to electro-thermal MEMSI. MOR can successfully create dynamic compact thermal models of MEMS devices. It is currently possible to use software tool “MOR for ANSYS” (pronounced “more for ANSYS”) to automatically create reduced order thermal models directly from ANSYS models with more than 500 000 degrees of freedom. Model order reduction is automatic and based on the implicit Pad approximation of the transfer function via the Arnoldi algorithm. After model reduction, one can visualize simulation results of the reduced model in Mathematica and can call the SLICOT library via the Mathlink interface in order to obtain mathematically optimal reduced models. Reduced models are easily convertible into hardware description language (HDL) form, and can be directly used for system-level simulation.
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Bechtold, T., Rudnyi, E.B., Korvink, J.G. (2008). Model Order Reduction for MEMS: Methodology and Computational Environment for Electro-Thermal Models. In: Schilders, W.H.A., van der Vorst, H.A., Rommes, J. (eds) Model Order Reduction: Theory, Research Aspects and Applications. Mathematics in Industry, vol 13. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-78841-6_18
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