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Mechanical Properties of Nanostructures

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Nanotribology and Nanomechanics

Abstract

Structural integrity is of paramount importance in all devices. Load applied during the use of devices can result in component failure. Cracks can develop and propagate under tensile stresses, leading to failure. Knowledge of the mechanical properties of nanostructures is necessary for designing realistic MEMS/NEMS and BioMEMS/BioNEMS devices. Elastic and inelastic properties are needed to predict deformation from an applied load in the elastic and inelastic regimes, respectively. The strength property is needed to predict the allowable operating limit. Some of the properties of interest are hardness, elastic modulus, bending strength, fracture toughness and fatigue strength. Many of the mechanical properties are scale dependent therefore these should be measured at relevant scales. Atomic force microscopy and nanoindenters can be used satisfactorily to evaluate the mechanical properties of micro/nanoscale structures. Commonly used materials in MEMS/NEMS are single-crystal silicon and silicon-based materials, e.g., SiO2 and polysilicon films deposited by low-pressure chemical vapor deposition. An early study showed silicon to be a mechanically resilient material in addition to its favorable electronic properties. Single-crystal SiC deposited on large-area silicon substrates is used for high-temperature micro/nanosensors and actuators. Amorphous alloys can be formed on both metal and silicon substrates by sputtering and plating techniques, providing more flexibility in surface-integration. Electroless deposited Ni-P amorphous thin films have been used to construct microdevices, especially using the so-called LIGA techniques. Micro/nanodevices need conductors to provide power, as well as electrical/magnetic signals to make them functional. Electroplated gold films have found wide applications in electronic devices because of their ability to make thin films and process simply. Polymers, such as poly (methyl methacrylate) (PMMA) and poly (dimethylsiloxane) (PDMS) are commonly used in BioMEMS/BioNEMS, such as micro/nanofluidic devices, because of ease of manufacturing and reduced cost. The use of polymers also offers a wide range of material properties to allow tailoring of biological interactions for improved biocompatibility. This chapter presents a review of mechanical property measurements on the micro/nanoscale of various materials of interest and stress and deformation analyses of nanostructures.

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  1. Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics (NLB2), Ohio State University, 201W. 19th Avenue, 43210-1142, Columbus, Ohio, USA

    Bharat Bhushan

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Bhushan, B. (2008). Mechanical Properties of Nanostructures. In: Nanotribology and Nanomechanics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-77608-6_14

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