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Microtransducer Operation

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MEMS: A Practical Guide to Design, Analysis, and Applications

Abstract

Rooted in mechanical, electrical, and chemical engineering and relying on physical insight, biological techniques, and materials science know-how, microelectromechanical systems (MEMS) engineering is a fundamentally interdisciplinary field. Its fascinating diversity often forces the research and development engineer to take into account a broader range of issues than in many classical, well-established technical disciplines. Simultaneously, the diversity creates the impression of a lack of unity, contrasting strongly with the classical disciplines of science and engineering. These are usually able to offer a core of thoughts stripped of unnecessary details, with well-established foundations and lines of thought, and representations accepted by the majority of researchers active in the field. More peripheral aspects of the disciplines can be built up from a solid basis of knowledge.

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Authors and Affiliations

  1. Institute of Microsystem Technology IMTEK, University of Freiburg, Germany

    Oliver Paul

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  1. Oliver Paul
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Editors and Affiliations

  1. Institute for Microsystem Technology IMTEK, University of Freiburg, Freiburg, Germany

    Jan G. Korvink  & Oliver Paul  & 

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Paul, O. (2006). Microtransducer Operation. In: Korvink, J.G., Paul, O. (eds) MEMS: A Practical Guide to Design, Analysis, and Applications. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-33655-6_1

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  • DOI: https://doi.org/10.1007/978-3-540-33655-6_1

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  • Print ISBN: 978-3-540-21117-4

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