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Scanning Nanopipette Probe Microscope for Nanofabrication Using Atmospheric Pressure Plasma Jet

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Recent Global Research and Education: Technological Challenges

Part of the book series: Advances in Intelligent Systems and Computing ((AISC,volume 519))

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Abstract

We developed a novel scanning probe microscope (SPM) technique for fine processing of material surface using a localized fine atmospheric pressure plasma jet (APPJ) generated from a nanopipette. The nanopipette is a tapered glass capillary with an aperture of sub-micrometer. Using the nanopipette as a nozzle, it was possible to localize irradiation area of the APPJ. The nanopipette could also be used as a probe for a scanning probe microscope operated with shear-force feedback control, which is capable of positioning the pipette edge in the vicinity of material surfaces for APPJ processing. By using the SPM system, sub-micrometer holes were successfully fabricated.

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Authors and Affiliations

  1. Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu, Japan

    Futoshi Iwata, Daisuke Morimatsu, Hiromitsu Sugimoto, Atsushi Nakamura & Akihisa Ogino

  2. Research Institute of Electronics, Shizuoka University, Hamamatsu, Japan

    Futoshi Iwata & Masaaki Nagatsu

  3. Graduate School of Science and Technology, Shizuoka University, Hamamatsu, Japan

    Masaaki Nagatsu

Authors
  1. Futoshi Iwata
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  2. Daisuke Morimatsu
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  3. Hiromitsu Sugimoto
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  4. Atsushi Nakamura
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  5. Akihisa Ogino
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  6. Masaaki Nagatsu
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Corresponding author

Correspondence to Futoshi Iwata .

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Editors and Affiliations

  1. Institute of Metrology and Biomedical En, Warsaw University of Technology Institute of Metrology and Biomedical En, Warsaw, Poland

    Ryszard Jabłoński

  2. Institute of Metrology and Biomedical En, Warsaw University of Technology Institute of Metrology and Biomedical En, Warsaw, Poland

    Roman Szewczyk

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Iwata, F., Morimatsu, D., Sugimoto, H., Nakamura, A., Ogino, A., Nagatsu, M. (2017). Scanning Nanopipette Probe Microscope for Nanofabrication Using Atmospheric Pressure Plasma Jet. In: Jabłoński, R., Szewczyk, R. (eds) Recent Global Research and Education: Technological Challenges. Advances in Intelligent Systems and Computing, vol 519. Springer, Cham. https://doi.org/10.1007/978-3-319-46490-9_16

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  • DOI: https://doi.org/10.1007/978-3-319-46490-9_16

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-46489-3

  • Online ISBN: 978-3-319-46490-9

  • eBook Packages: EngineeringEngineering (R0)

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