Skip to main content

Protecting the Vacuum System

  • Chapter
  • First Online:
Experimental Innovations in Surface Science
  • 2307 Accesses

Abstract

Power interruptions can play havoc with UHV systems operating with a turbopump, and particularly when these systems are being baked out. A power failure has the effect of venting a turbopump, using the commercial vent valve designed to prevent oil back-streaming from the forepump into the turbopump and the vacuum chamber during a power interruption.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 229.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 299.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 299.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. J.A. Polta, P.A. Thiel, J. Vac. Sci. Technol. A5, 386 (1987)

    Article  ADS  Google Scholar 

  2. Balzers Part No. TCV 102. Obtained from Balzers, 8 Sagamore Park, Hudson, NH 03051

    Google Scholar 

  3. J.P. Saint-Germain, G. Abel, B.L. Stansfield, J. Vac. Sci. Technol. A4, 2391 (1986)

    Article  ADS  Google Scholar 

  4. Time delay CNS-35-76 from Newark Electronics, 4801 N. Ravenswood Avenue, Chicago, IL 60640-4496

    Google Scholar 

  5. Available from Tripp Lite, 500 N. Orleans Street, Chicago, IL 60610

    Google Scholar 

  6. Vacoa model SOV-050-00-SS, Vacuum Accessories Corporation of America, 390 Central Avenue, Bohemia, NY 11716

    Google Scholar 

  7. T. Engel, D.N. Braid, Rev. Sci. Instrum. 57, 301 (1986)

    Article  ADS  Google Scholar 

  8. J.J. Zinck, W.H. Weinberg, Rev. Sci. Instrum. 55, 810 (1984)

    Article  ADS  Google Scholar 

  9. L.H. Dubois, J. Vac. Sci. Technol. A6, 162 (1988)

    Article  ADS  Google Scholar 

  10. J.T. Fitch, J.J. Sumakeris, G. Lucovsky, J. Vac. Sci. Technol. A11, 2871 (1993)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to John T. Yates Jr. .

Rights and permissions

Reprints and permissions

Copyright information

© 2015 Springer International Publishing Switzerland

About this chapter

Cite this chapter

Yates, J.T. (2015). Protecting the Vacuum System. In: Experimental Innovations in Surface Science. Springer, Cham. https://doi.org/10.1007/978-3-319-17668-0_49

Download citation

Publish with us

Policies and ethics