Abstract
In ultrahigh vacuum evaporation of materials to produce thin films, the accumulation of deposits on observation windows can be detrimental to temperature measurements using an optical pyrometer. A calibration procedure using a constant temperature internal source has been described earlier (see p. 411), and this method will work for thin film deposits. However, a preferable procedure involves shuttering the window so that short observations can be made; then the window can be protected during most of the evaporation period. An internal rotatable shutter provides one way to do this, and the design shown in Fig. 45.1 shows another method (Chambers, J Vac Sci Technol A7:259, 1989).
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Yates, J.T. (2015). Observation Windows. In: Experimental Innovations in Surface Science. Springer, Cham. https://doi.org/10.1007/978-3-319-17668-0_45
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DOI: https://doi.org/10.1007/978-3-319-17668-0_45
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