Abstract
Beam dosers for quantitative exposure of surfaces to gases have become widely used in surface science research. This is because of the disadvantages in filling an ultrahigh vacuum system with gas in order to study adsorption processes. These disadvantages relate to the large gas loads needed for system dosing as compared to beam dosing. Such large gas loads result in adsorption on the walls of the vacuum chamber, which then contributes to slow achievement of base pressure after adsorption by the sample surface is complete. In addition, large gas loads in a vacuum system can cause displacement effects from the system walls leading to impurity adsorption, as well as regurgitation effects from ion pumps in which impurity gases are produced (see p. 72). Also, the use of quantitative and absolute calibration procedures for the gas flux coming from a collimated doser is much superior to dosing with a system dose using an ionization gauge or a mass spectrometer, both of which have serious problems with absolute calibration.
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Yates, J.T. (2015). Gases. In: Experimental Innovations in Surface Science. Springer, Cham. https://doi.org/10.1007/978-3-319-17668-0_37
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