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Discrete-Time Modelling of Sigma-Delta Inspired Systems for MEMS

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Nonlinear Maps and their Applications

Part of the book series: Springer Proceedings in Mathematics & Statistics ((PROMS,volume 112))

Abstract

This chapter discusses a variety of system structures for microelectromechanical systems (MEMS) that employ a feedback loop inspired by sigma-delta modulation. Sigma-delta modulators are classic electronic circuits that implement data conversion. The feedback loop typical for sigma-delta modulation can be applied to actuate a MEMS device or control its state. The dynamics of such systems are described by a set of discrete-time equations (map). We show how these maps can be derived for different examples of MEMS and highlight the dynamics that are universal for all examples.

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Acknowledgement

This work was supported by Science Foundation Ireland.

Author information

Authors and Affiliations

  1. School of Electrical, Electronic and Communications Engineering, University College Dublin, Dublin, Ireland

    E. Blokhina, P. Giounanlis & O. Feely

  2. Micro- and Nanotechnology Group, Universitat Politécnica de Catalunya, Barcelona, Spain

    M. Dominguez-Pumar, S. Gorreta & J. Pons-Nin

Authors
  1. E. Blokhina
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  2. P. Giounanlis
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  3. M. Dominguez-Pumar
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  4. S. Gorreta
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  5. J. Pons-Nin
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  6. O. Feely
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Corresponding author

Correspondence to E. Blokhina .

Editor information

Editors and Affiliations

  1. Facultad de Ciencias, Universidad de Zaragoza, Zaragoza, Spain

    Ricardo López-Ruiz

  2. Université de Toulouse, LAAS-CNRS, INSA, Toulouse, France

    Danièle Fournier-Prunaret

  3. Department of E.E. Eng., Tokushima University, Tokushima, Japan

    Yoshifumi Nishio

  4. Department of Mathematics, University of Évora, CIMA-UE, Évora, Portugal

    Clara Grácio

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Blokhina, E., Giounanlis, P., Dominguez-Pumar, M., Gorreta, S., Pons-Nin, J., Feely, O. (2015). Discrete-Time Modelling of Sigma-Delta Inspired Systems for MEMS. In: López-Ruiz, R., Fournier-Prunaret, D., Nishio, Y., Grácio, C. (eds) Nonlinear Maps and their Applications. Springer Proceedings in Mathematics & Statistics, vol 112. Springer, Cham. https://doi.org/10.1007/978-3-319-12328-8_3

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