Abstract
Confining low temperature plasma in cavities or channels having mesoscopic dimensions (1–1000 \(\upmu \)m) has opened a new avenue for plasma science and its applications. This chapter provides a brief overview of the current understanding of microplasma physics, and discusses the distinctives of microcavity plasmas with respect to conventional (macroscopic) plasmas. Notable properties of microcavity plasmas include their peak and time-averaged electron densities as well as power dissipated per unit volume. Applications of arrays of microcavity and microchannel plasmas described here include plasma printing, plasmachemical generation of commercially-valuable products such as ozone, and UHF receiving antennas comprising parallel microchannel plasmas.
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Acknowledgments
Discussions with S. Macheret and M. Kushner are greatly appreciated, and many thanks are extended to present and former members of the Laboratory for Optical Physics and Engineering at the University of Illinois. Their tireless efforts are responsible for a significant fraction of the results discussed here. One of us (JGE) also wishes to thank G. Eisenstein and A. Shwartz for their gracious hospitality at the Israel Institute of Technology (Technion) while this chapter was in preparation. The support of the U.S. Air Office of Scientific Research (H.R. Schlossberg) under grants FA9550-10-1-0048 and FA9550-12-1-0487 is gratefully acknowledged.
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Eden, J.G., Park, SJ. (2014). Microcavity and Microchannel Plasmas: General Characteristics and Emerging Applications. In: Bonitz, M., Lopez, J., Becker, K., Thomsen, H. (eds) Complex Plasmas. Springer Series on Atomic, Optical, and Plasma Physics, vol 82. Springer, Cham. https://doi.org/10.1007/978-3-319-05437-7_11
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