Abstract
A newly developed technology, the helium ion microscope (HIM), provides high-resolution imaging with several benefits compared to the standard scanning electron microscope (SEM). First, the images provide high resolution because the helium beam can be brought to a focused probe size that can be as small as 0.25 nm. Second, the images provide contrast mechanisms that are often markedly different from the SEM. These contrast mechanisms can reveal topographic, composition, and other types of information about the sample. Third, compared to the SEM, the HIM images tend to be more surface-specific – revealing information about the surface without the confusing subsurface information. Fourth, the HIM can obtain high-resolution images even of insulating samples that would otherwise charge excessively in the SEM. The HIM is still in its infancy compared to the SEM, having only been commercially available for 7 years; however, it has already provided several unique advantages for the imaging of biological materials.
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References
Joens MS, Huynh C, Kasuboski JM, Ferranti D, Sigal YJ, Zeitvogel F, Obst M, Burkhardt CJ, Curran KP, Chalasani SH, Stern LA, Goetze B, Fitzpatrick JAJ. Helium ion microscopy (HIM) for the imaging of biological samples at sub-nanometer resolution. Sci Rep. 2013;3:3514.
Ward B, Notte J, Economou NP. Helium ion microscope: a new tool for nanoscale microscopy and metrology. J Vac Sci Technol B. 2006;24:2871–4.
Economou NP, Notte JA, Thompson WB. Scanning. 2012;34(2):83–9.
Goldstein J, Newbury DE, Joy DC, Lyman C, Echlin PE, Lifshin E, Sawyer L, Michael J. Scanning electron microscopy and X-ray microanalysis. 3rd ed. New York: Kluwer/Plenum Publishers; 2003. p. 49.
Tondare VN. Quest for a high brightness monochromatic noble gas ion source. J Vac Sci Technol A. 2005;23(6):1498–507.
Hill R, Notte JA, Scipioni L. In: Hawkes PW, editors. Advances in imaging and electron physics, vol. 170. Elsevier; 2013. p. 65–128.
Oppenheimer JR. Three notes on the quantum theory of aperiodic effects. Phys Rev. 1928;31:66–81.
Tsong TT. Atom probe field ion microscopy. New York: Cambridge University Press; 1990.
Müller EW, Tsong TT. Field ion microscopy, principles and applications. New York: Elsevier; 1969.
Hill R, Notte J, Ward B. The ALIS helium ion source and its application to high resolution microscopy. Phys Procedia. 2008;1:135–41.
Ernst N, Bozdech G, Schmidt H, Schmidt WA, Larkins GL. On the full-width-half-maximum of field ion energy distributions. Appl Surf Sci. 1993;67:111–17.
Reimer L. Scanning electron microscopy. 2nd ed. New York: Springer; 1998. p. 27.
Orloff J, Swanson LW, Utlaut M. Fundamental limits to imaging resolution for focused ion beams. J Vac Sci Technol B. 1996;14(6):3759–63.
Inai K, Ohya K, Ishitani T. Simulation study on image contrast and spatial resolution in helium ion microscope. J Electron Microsc. 2007;56:163–9.
Bell DC. Contrast mechanisms and image formation in helium ion microscopy. Microsc Microanal. 2011;17:147–53.
Ramachandra R, Griffin B, Joy DC. A model for secondary electron imaging in the helium ion microscope. Ultramicroscopy. 2009;109:748–57.
Ziegler JF, Biersack JP, Littmark U. The stopping and range of ions in solids, vol. 1, Stopping and ranges of ions in matter. New York: Pergamon Press; 1984. For the updated version, see SRIM Version 2013 (www.SRIM.com).
Drouin D, Couture AR, Joly D, Tastet X, Aimez V, Gauvin R. CASINO V2.42 – a fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users. Scanning. 2007;29(3):92–101.
Rutherford E, Geiger H, Marsden E. The scattering of α and β particles by matter and the structure of the atom. Phil Mag. 1911;Series 6, 21:669–88.
Sijbrandij S, Notte J, Sanford C, Hill R. Analysis of subsurface beam spread and its impact on the image resolution of the helium ion microscope. J Vac Sci Technol B. 2010;28(6):C6F6–9.
Goldstein J, Newbury DE, Joy DC, Lyman C, Echlin PE, Lifshin E, Sawyer L, Michael J. Scanning electron microscopy and X-ray microanalysis. 3rd ed. New York: Kluwer/Plenum Publishers; 2003.
Petrov YV, Vyvenko OF, Bondarenko AS. Scanning helium ion microscope: distribution of secondary electrons and ion channeling. J Surf Invest X-Ray Synchrotron Neutron Tech. 2010;4(5):792–5.
Kostinski S, Yao N. Rutherford backscattering oscillation in scanning helium ion microscopy. J Appl Phys. 2011;109:064311.
Rabalais JW. Principles and applications of ion scattering spectroscopy. Hoboken: Wiley Interscience; 2003.
Sijbrandij S, Notte J, Scipioni L, Huynh C, Sanford C. Analysis and metrology with a focused ion beam. J Vac Sci Technol B. 2010;28(1):73–7.
MacRae CM, Wilson NC. Luminescence database I – minerals and materials. Microsc Microanal. 2008;14(2):184–204.
Boden SA, Franklin TMW, Scipioni L, Bagnall DM, Rutt HN. Ionoluminescence in the helium ion microscope. Microsc Microanal. 2012;18(06):1253–62.
Benninghoven A, Rüdenauer FG, Werner HW. Secondary ion mass spectrometry: basic concepts, instrumental aspects, applications, and trends. New York: Wiley; 1987.
Wirtz T, Vanhove N, Pillatsch L, Dowsett D, Sijbrandij S, Notte J. Towards secondary ion mass spectrometry on the helium ion microscope: an experimental and simulation based study with He+ and Ne+ bombardment. Appl Phys Lett. 2012;101:041601.
Pawley J, Schatten H. Biological low-voltage scanning electron microscopy. New York: Springer; 2008.
Crang FE, Klomparens KL. Artifacts in biological electron microscopy. New York: Plenum Press; 1988.
Vanden Berg-Foels WS, Scipioni L, Huynh C, Wen X. Helium ion microscopy for high-resolution visualization of the articular cartilage collagen network. J Microsc. 2012;246(2):168–76.
Rice WL, Van Hoek AN, Păunescu TG, Huynh C, Goetze B, Singh B, Scipioni L, Stern LA, Brown D. High resolution helium ion scanning microscopy of the rat kidney. PLoS One. 2013;8(3):e57501.
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Notte, J., Goetze, B. (2014). Imaging with the Helium Ion Microscope. In: Smentkowski, V. (eds) Surface Analysis and Techniques in Biology. Springer, Cham. https://doi.org/10.1007/978-3-319-01360-2_7
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