Abstract
The article considers the results of designing an automatic control system (ACS) for plasma processing unit Multi Plasma Cleaner One (MPC One). The appearance of the installation and its features are presented. The advantages of plasma treatment and its application areas are given. The analysis of existing plasma processing units is carried out and the need for automation of the MPC One installation is proved. Two gas lines are provided for physical and chemical cleaning. The designed automatic control system for the MPC One unit allows the operator to carry out plasma processing in automatic mode. The MPC One unit is equipped with high-frequency and low-frequency generators. The review of the sources of information on plasma processing of products is carried out, which justifies the advantages and areas of its application. The graphical interface was created, and the Python program was written for the MPC One automatic control system. MPC One unit uses well-established recipes. The article gives a description of the interface. Signals that manage the equipment (output signals) and monitor the process and equipment (input signals) are analyzed. The debugging stand and the interface to it were created for testing the software. Devices that check the operation of each of the processed signals were selected. ACS will eliminate operator errors and more effectively control the process.
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Ezhova, P.A., Vasilev, D.D., Sidorova, S.V., Moiseev, K.M. (2021). Automatic Control System for the Plasma Processing Unit Multi Plasma Cleaner One. In: Radionov, A.A., Gasiyarov, V.R. (eds) Advances in Automation II. RusAutoCon 2020. Lecture Notes in Electrical Engineering, vol 729. Springer, Cham. https://doi.org/10.1007/978-3-030-71119-1_7
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DOI: https://doi.org/10.1007/978-3-030-71119-1_7
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