Abstract
Homoepitaxial growth of β-Ga2O3 on β-Ga2O3 substrates by halide vapor-phase epitaxy (HVPE) using GaCl and O2 was investigated by both thermodynamic analysis and growth experiments. The thermodynamic analysis clarified that growth of Ga2O3 is expected at high temperatures around 1000 °C using an inert carrier gas. The experimental results revealed that homoepitaxial growth of unintentionally doped (UID) layers with a low effective donor concentration (Nd − Na) of less than 1013 cm−3 is possible at 1000 °C on β-Ga2O3 (001) substrates with a high growth rate of up to 28 μm/h. Furthermore, HVPE growth of intentionally Si-doped β-Ga2O3 layers was investigated by supplying SiCl4, which revealed that n-type carrier density almost equal to the Si-doping concentration can be controlled in the range of 1015–1018 cm−3. The carrier mobility decreased with increasing Si impurity concentration and was about 150 cm2/V·s at room temperature for a layer with a carrier density of 3.2 × 1015 cm−3. Thus, the intentionally Si-doped homoepitaxial layers grown on β-Ga2O3 substrates can be applicable for the production of β-Ga2O3-based power devices.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Y. Tomm, P. Reiche, D. Klimm, T. Fukuda, J. Cryst. Growth 220, 510 (2000)
Z. Galazka, R. Uecker, K. Irmscher, M. Albrecht, D. Klimm, M. Pietsch, M. Brützam, R. Bertram, S. Ganschow, R. Fornari, Cryst. Res. Technol. 45, 1229 (2010)
E.G. Víllora, K. Shimamura, Y. Yoshikawa, K. Aoki, N. Ichinose, J. Cryst. Growth 270, 420 (2004)
K. Hoshikawa, E. Ohba, T. Kobayashi, J. Yanagisawa, C. Miyagawa, Y. Nakamura, J. Cryst. Growth 447, 36 (2016)
H. Aida, K. Nishiguchi, H. Takeda, N. Aota, K. Sunakawa, Y. Yaguchi, Jpn. J. Appl. Phys. 47, 8506 (2008)
A. Kuramata, K. Koshi, S. Watanabe, Y. Yamaoka, T. Masui, S. Yamakoshi, Jpn. J. Appl. Phys. 55, 1202A2 (2016)
T. Oshima, N. Arai, N. Suzuki, S. Ohira, S. Fujita, Thin Solid Films 516, 5768 (2008)
K. Sasaki, A. Kuramata, T. Masui, E.G. Víllora, K. Shimamura, S. Yamakoshi, Appl. Phys. Express 5, 035502 (2012)
H. Okumura, M. Kita, K. Sasaki, A. Kuramata, M. Higashiwaki, J.S. Speck, Appl. Phys. Express 7, 095501 (2014)
S. Lee, K. Kaneko, S. Fujita, Jpn. J. Appl. Phys. 55, 1202B8 (2016)
G. Wagner, M. Baldini, D. Gogova, M. Schmidbauer, R. Schewski, M. Albrecht, Z. Galazka, D. Klimm, R. Fornari, Phys. Status Solidi A 211, 27 (2014)
X. Du, W. Mi, C. Luan, Z. Li, C. Xia, J. Ma, J. Cryst. Growth 404, 75 (2014)
M. Baldini, M. Albrecht, A. Fiedler, K. Irmscher, R. Schewski, G. Wagner, ECS J. Solid State Sci. Technol. 6, Q3040 (2017)
K. Nomura, K. Goto, R. Togashi, H. Murakami, Y. Kumagai, A. Kuramata, S. Yamakoshi, A. Koukitu, J. Cryst. Growth 405, 19 (2014)
H. Murakami, K. Nomura, K. Goto, K. Sasaki, K. Kawara, Q.T. Thieu, R. Togashi, Y. Kumagai, M. Higashiwaki, A. Kuramata, S. Yamakoshi, B. Monemar, A. Koukitu, Appl. Phys. Express 8, 015503 (2015)
Q.T. Thieu, D. Wakimoto, Y. Koishikawa, K. Sasaki, K. Goto, K. Konishi, H. Murakami, A. Kuramata, Y. Kumagai, S. Yamakoshi, Jpn. J. Appl. Phys. 56, 110310 (2017)
K. Konishi, K. Goto, R. Togashi, H. Murakami, M. Higashiwaki, A. Kuramata, S. Yamakoshi, B. Monemar, Y. Kumagai, J. Cryst. Growth 492, 39 (2018)
K. Goto, K. Konishi, H. Murakami, Y. Kumagai, B. Monemar, M. Higashiwaki, A. Kuramata, S. Yamakoshi, Thin Solid Films 666, 182 (2018)
K. Konishi, K. Goto, H. Murakami, Y. Kumagai, A. Kuramata, S. Yamakoshi, M. Higashiwaki, Appl. Phys. Lett. 110, 103506 (2017)
J. Yang, S. Ahn, F. Ren, S.J. Pearton, S. Jang, J. Kim, A. Kuramata, Appl. Phys. Lett. 110, 192101 (2017)
K. Sasaki, D. Wakimoto, Q.T. Thieu, Y. Koishikawa, A. Kuramata, M. Higashiwaki, S. Yamakoshi, IEEE Electron Device Lett. 38, 783 (2017)
K. Sasaki, Q.T. Thieu, D. Wakimoto, Y. Koishikawa, A. Kuramata, S. Yamakoshi, Appl. Phys. Express 10, 124201 (2017)
Z. Hu, K. Nomoto, W. Li, N. Tanen, K. Sasaki, A. Kuramata, T. Nakamura, D. Jena, H.G. Xing, IEEE Electron Device Lett. 39, 869 (2018)
M.H. Wong, K. Goto, H. Murakami, Y. Kumagai, M. Higashiwaki, IEEE Electron Device Lett. 40, 431 (2019)
M.W. Chase Jr. (ed.), NIST-JANAF Thermochemical Tables (The American Chemical Society and the American Institute of Physics for the National Institute of Standards and Technology, Gaithersburg, 1998)
L.V. Gurvich, I.V. Veyts, C.B. Alcock (eds.), Thermodynamic Properties of Individual Substances (USSR Academy of Sciences, Institute for High Temperatures and State Institute of Applied Chemistry in cooperation with the National Standard Reference Data Service of the U.S.S.R., Moscow, 1994)
M. Tirtowidjojo, R. Pollard, J. Cryst. Growth 77, 200 (1986)
M. Passlack, N.E.J. Hunt, E.F. Schubert, G.J. Zydzik, M. Hong, J.P. Mannaerts, R.L. Opila, R.J. Fischer, Appl. Phys. Lett. 64, 2715 (1994)
M. Higashiwaki, K. Konishi, K. Sasaki, K. Goto, K. Nomura, Q.T. Thieu, R. Togashi, H. Murakami, Y. Kumagai, B. Monemar, A. Koukitu, A. Kuramata, S. Yamakoshi, Appl. Phys. Lett. 108, 133503 (2016)
M.H. Wong, K. Sasaki, A. Kuramata, S. Yamakoshi, M. Higashiwaki, Appl. Phys. Lett. 106, 032105 (2015)
J.B. Varley, J.R. Weber, A. Janotti, C.G. Van de Walle, Appl. Phys. Lett. 97, 142106 (2010)
T. Oishi, Y. Koga, K. Harada, M. Kasu, Appl. Phys. Express 8, 031101 (2015)
N.T. Son, K. Goto, K. Nomura, Q.T. Thieu, R. Togashi, H. Murakami, Y. Kumagai, A. Kuramata, M. Higashiwaki, A. Koukitu, S. Yamakoshi, B. Monemar, E. Janzén, J. Appl. Phys. 120, 235703 (2016)
N. Ma, N. Tanen, A. Verma, Z. Guo, T. Luo, H. Xing, D. Jena, Appl. Phys. Lett. 109, 212101 (2016)
Acknowledgements
This work was partially supported by the Council for Science, Technology and Innovation (CSTI), Cross-ministerial Strategic Innovation Promotion Program (SIP), “Next-generation power electronics” (funding agency: NEDO). The authors would like to express their sincere thanks to Dr. M. Higashiwaki of NICT, Japan, for his help in the electrical measurements and for fruitful discussions.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2020 Springer Nature Switzerland AG
About this chapter
Cite this chapter
Kumagai, Y., Konishi, K., Goto, K., Murakami, H., Monemar, B. (2020). Halide Vapor Phase Epitaxy 1. In: Higashiwaki, M., Fujita, S. (eds) Gallium Oxide. Springer Series in Materials Science, vol 293. Springer, Cham. https://doi.org/10.1007/978-3-030-37153-1_10
Download citation
DOI: https://doi.org/10.1007/978-3-030-37153-1_10
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-37152-4
Online ISBN: 978-3-030-37153-1
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)