Bias Stability Limit in Resonant Gyroscopes

Abstract

The current prototype resonant MEMS gyroscopes demonstrate promising performance for short-term or GPS-aided inertial navigation applications. Studying the source of errors and limiting factors in current designs can provide insight into how to further improve the performance and turn the prototypes into products that are feasible for applications with higher performance requirements. Experiments and numerical studies of current prototypes are presented in this chapter to establish an understanding of the limiting phenomena responsible for BI in high-frequency resonant gyroscopes and provide strategies for future improvements toward long-range on-chip inertial navigation.