Abstract
High-performance MEMS gyroscopes can be used for inertial navigation in GPS-denied environments, as well as for scientific applications such as low-cost geophysical measurements and relativity experiments. This chapter presents the theories of resonant MEMS gyroscope and focuses on understanding the physical phenomena in resonant MEMS gyroscopes to provide insight to the performance scaling limits. Key performance parameters are described, and a general discussion on electrostatic compensation of the imperfections in MEMS gyroscopes is given in this chapter.
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Wen, H. (2019). The Physics of Resonant MEMS Gyroscopes. In: Toward Inertial-Navigation-on-Chip. Springer Theses. Springer, Cham. https://doi.org/10.1007/978-3-030-25470-4_2
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DOI: https://doi.org/10.1007/978-3-030-25470-4_2
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