Abstract
When investigating the behaviour of a MEMS device, it might be necessary to model different physical domains which co-exist and interact in the same materials. The relevant analysis implies to solve a system of partial derivative equations, the unknowns of which are time-varying fields acting in the region under study. This is a general concept of coupled-field problem, sometimes referred to as a multiphysics field problem.
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Di Barba, P., Wiak, S. (2020). Coupled Fields: Multi-physics Analysis of MEMS. In: MEMS: Field Models and Optimal Design. Lecture Notes in Electrical Engineering, vol 573 . Springer, Cham. https://doi.org/10.1007/978-3-030-21496-8_9
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DOI: https://doi.org/10.1007/978-3-030-21496-8_9
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