Skip to main content

Numerical Methods for Field Analysis of MEMS

  • Chapter
  • First Online:
MEMS: Field Models and Optimal Design

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 573 ))

  • 861 Accesses

Abstract

The finite element method has, in recent decades, become by far the most popular technique in computational electromagnetism. Many general purpose computer codes have been developed which provide toolboxes for computer-aided-design (CAD) of devices and systems. The technique is not suitable for hand calculations, and the algorithm is somewhat complicated; nevertheless, the formulation of the simplest two-dimensional case shall be followed to demonstrate the principle and to clarify some aspects of the applications.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

eBook
USD 16.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 16.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 139.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Chari MVK, Silvester PP (1980) Finite elements in electrical and magnetic field problems. Wiley

    Google Scholar 

  2. Davies AJ (1980) The finite element method. Clarendon

    Google Scholar 

  3. Di Barba P, Savini A, Wiak S (2008) Field models in electricity and magnetism. Springer, Berlin, Germany

    Book  Google Scholar 

  4. Hammond P, Sykulski JK (1994) Engineering electromagnetism. Oxford University Press, Oxford

    Google Scholar 

  5. Reece ABJ, Preston TW (2000) Finite element methods in electrical power engineering. Oxford University Press, Oxford

    Google Scholar 

  6. Segerlind LJ (1976) Applied finite element analysis. Wiley, New York

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Paolo Di Barba .

Rights and permissions

Reprints and permissions

Copyright information

© 2020 Springer Nature Switzerland AG

About this chapter

Check for updates. Verify currency and authenticity via CrossMark

Cite this chapter

Di Barba, P., Wiak, S. (2020). Numerical Methods for Field Analysis of MEMS. In: MEMS: Field Models and Optimal Design. Lecture Notes in Electrical Engineering, vol 573 . Springer, Cham. https://doi.org/10.1007/978-3-030-21496-8_8

Download citation

  • DOI: https://doi.org/10.1007/978-3-030-21496-8_8

  • Published:

  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-030-21495-1

  • Online ISBN: 978-3-030-21496-8

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics