Abstract
The miniaturisation of electromechanical systems is impacting our society as deeply as did the mass production of electronic systems in the last few decades. However, only in more recent times the design of MEMS has been approached in a systematic way, by employing methods and algorithms of automated optimal design (AOD).
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Reference
Jones TB, Nenadic NG (2013) Electromechanics and MEMS. Cambridge University Press
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Di Barba, P., Wiak, S. (2020). MEMS Modelling: Distributed versus Lumped Parameter Models. In: MEMS: Field Models and Optimal Design. Lecture Notes in Electrical Engineering, vol 573 . Springer, Cham. https://doi.org/10.1007/978-3-030-21496-8_2
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DOI: https://doi.org/10.1007/978-3-030-21496-8_2
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