Abstract
This introductory monograph presents a broad overview of methods of both analysis and synthesis of Micro Electro Mechanical Systems (MEMS) and devices, mainly addressed to graduate students and young researchers in the area of electrical and computer engineering as well as mechatronics. Throughout the book each theoretical concept is illustrated by means of case studies, following a problem-solving approach and never forgetting that the engineering task is just that of formulating and solving problems in a computational fashion. Having this in mind, the authors have collected the experience they have accumulated while teaching electromagnetics and electromechanics at various levels and in different countries, in this book, which is intended to be valid for an international audience.
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Di Barba, P., Wiak, S. (2020). Introduction. In: MEMS: Field Models and Optimal Design. Lecture Notes in Electrical Engineering, vol 573 . Springer, Cham. https://doi.org/10.1007/978-3-030-21496-8_1
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DOI: https://doi.org/10.1007/978-3-030-21496-8_1
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Publisher Name: Springer, Cham
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Online ISBN: 978-3-030-21496-8
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