Abstract
With the increasingly widespread adoption of micromanufacturing solutions and with the production of a growing number of artifacts defined at the microscopic and submicroscopic scales, increasingly smaller geometries need to be verified for quality assurance. The study of precision at micro and submicro scales is gaining considerable interest: relevant issues pertain to how to define allowable geometric error on parts of such small sizes (e.g., semiconductor products, microelectromechanical systems, other microcomponents) with proper dimensional and geometric tolerances, and how to measure them. This work addresses the specific problem of assessing geometric error associated with micromanufactured surface features. Three-dimensional digital microscopes and profilometers for microtopography analysis are increasingly being adopted for such a task, owing to their suitability to operate at very small scales. However, this raises several challenges, as three-dimensional microscopes and profilometers have traditionally been used in different application domains, and are mainly aimed at the inspection of surface finish; new modes of operation must be identified which take into consideration such peculiarities. Both families of instruments need to be closely investigated, and their main constraints and benefits dissected and analyzed to assess their adaptability to the new task of assessing geometric error on micromanufactured parts or surface features.
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References
ISO 3274 (1998) Geometric product specifications (GPS) – surface texture: profile method – nominal characteristics of contact (stylus) instruments. International Organization for Standardization, Geneva
ISO 4287 (1997) Geometrical product specifications (GPS) – surface texture: profile method – terms, definitions and surface texture parameters. International Organization for Standardization, Geneva
ISO 4288 (1996) Geometrical product specifications (GPS) – surface texture: profile method – rules and procedures for the assessment of surface texture. International Organization for Standardization, Geneva
ISO 5436-1 (2000) Geometrical product specifications (GPS) – surface texture: profile method; measurement standards – part 1: material measures. International Organization for Standardization, Geneva
ISO 5436-2 (2001) Geometrical product specifications (GPS) – surface texture: profile method; measurement standards – part 2: software measurement standards. International Organization for Standardization, Geneva
ISO 5725-1,2,3,4 and 6 (1994) Accuracy (trueness and precision) of measurement methods and results. Parts: 1,2,3,4 and 6. International Organization for Standardization, Geneva
ISO 5725-5 (1998) Accuracy (trueness and precision) of measurement methods and results – part 5: alternative methods for the determination of the precision of a standard measurement method. International Organization for Standardization, Geneva
ISO 8785 (1998) Geometrical Product Specifications (GPS) – surface imperfections – terms definitions and parameters. International Organization for Standardization, Geneva
ISO 11562 (1996) Geometrical product specifications (GPS) – surface texture: profile method – metrological characteristics of phase correct filters. International Organization for Standardization, Geneva
ISO 12085 (1996) Geometrical product specifications (GPS) – surface texture: profile method – motif parameters. International Organization for Standardization, Geneva
ISO 12179 (2000) Geometrical product specifications (GPS) – surface texture: profile method – calibration of contact (stylus) instruments. International Organization for Standardization, Geneva
ISO 13565-1 (1996) Geometrical product specifications (GPS) – surface texture: profile method – surfaces having stratified functional properties – part 1: filtering and general measurement conditions. International Organization for Standardization, Geneva
ISO 13565-2 (1996) Geometrical product specifications (GPS) – surface texture: profile method – surfaces having stratified functional properties – part 2: height characterization using the linear material ratio curve. International Organization for Standardization, Geneva
ISO 13565-3 (1998) Geometrical product specifications (GPS) – surface texture: profile method – surfaces having stratified functional properties – part 3: height characterization using the material probability curve. International Organization for Standardization, Geneva
ISO 25178-6:2010 Geometrical product specifications (GPS) – Surface texture: Areal – Part 6: Classification of methods for measuring surface texture, International Organization for Standardization, Geneva
ISO 25178-601:2010 Geometrical product specifications (GPS) – Surface texture: Areal – Part 601: Nominal characteristics of contact (stylus) instruments, International Organization for Standardization, Geneva
ISO 25178-602:2010 Geometrical product specifications (GPS) – Surface texture: Areal – Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments, International Organization for Standardization, Geneva
ISO 25178-701:2010 Geometrical product specifications (GPS) – Surface texture: Areal – Part 701: Calibration and measurement standards for contact (stylus) instruments, International Organization for Standardization, Geneva
ISO/IEC Guide 98-3 (2008) Uncertainty of measurement – part 3: guide to the expression of uncertainty in measurement (GUM:1995), 1st edn. International Organization for Standardization, Geneva
ISO/IEC Guide 99:2007(E/F) (2007) International vocabulary of basic and general terms in Metrology (VIM). International Organization for Standardization, Geneva
.Abbott EJ, Firestone FA (1933a) A new profilograph measures roughness of finely finished and ground surfaces. Autom Ind 204
Abbott EJ, Firestone FA (1933b) Specifying surface quality: a method based on accurate measurement and comparison. Mech Eng 55: 569–572
Agilent Technologies (2009) Agilent Technologies – home page. http://www.home.agilent.com. Accessed 30 Sep 2009
AIST-NT (2009) AIST-NT – home page. http://www.aist-nt.com. Accessed 30 Sep 2009
Ambios Technology (2009) Ambios Technology – home page. http://www.ambiostech.com/index.html. Accessed 30 Sep 2009
Aspex (2009) Aspex Corporation – home page. http://www.aspexcorp.com. Accessed 30 Sep 2009
Asylum Research (2009) Asylum Research – home page. http://www.asylumresearch.com.
Bhushan B, Wyant JC, Koliopoulos CL (1985) Measurement of surface topography of magnetic tapes by Mirau interferometry. Appl Opt 24(10):1489–1497
Binnig G, Rohrer H (1983) Scanning tunnelling microscopy. Surf Sci 126:236–244
Binnig G, Quate CF, Gerber C (1986) Atomic force microscope. Phys Rev Lett 56(9):930–933
Bruker AXS (2009) Bruker AXS – home page. http://www.bruker-axs.com. Accessed 30 Sep 2009
CamScan Electron Optics (2009) CamScan Electron Optics – home page. http://www.camscan.com. Accessed 30 Sep 2009
Carl Zeiss (2009) Carl Zeiss International – home page. http://www.zeiss.com/explore. Accessed 29 Sep 2009
Danilatos GD, Postle R (1982) The environmental scanning electron microscope and its applications. Scanning Electron Microsc 1:1–16
Dupuy MO (1967) High-precision optical profilometer for the study of micro-geometrical surface defects. In: Proceedings of the Institute of Mechanical Engineers, vol 182, part 3k, pp 255–259
FEI (2009) FEI – home page. http://www.fei.com. Accessed 30 Sep 2009
FOGALE nanotech (2009) FOGALE nanotech – home page. http://www.fogale.fr. Accessed 30 Sep 2009
Fries Research & Technology (2009) FRT – home page. http://http://www.frt-gmbh.com/en/
Greivenkamp JE, Bruning JH (1992) Phase shifting interferometry. Opt Shop Test 501–599
Hamilton DK, Wilson T (1982) 3D surface measurement using confocal scanning microscopes. Appl Phys B 27:211–213
Hansen HN (2007) Dimensional metrology in micro manufacturing. Whittles/CRC, Botovets, pp 29–35
Hansen HN, Carneiro K, Haitjema H et al (2006) Dimensional micro and nano metrology. CIRP Ann Manuf Technol 55(2):721–743
Harasaki A, Schmit J, Wyant JC (2000) Improved vertical-scanning interferometry. Appl Opt 39(13):2107–2115
Hariharan P (1985) Optical interferometry. Academic, New York
Hirox (2009) Hirox Co Ltd – home page. http://http://www.hirox.com/global_home.html. Accessed 29 Sep 2009
Hitachi High Technologies America (2009) Hitachi High Technology – home page. http://www.hitachi-hta.com. Accessed 30 Sep 2009
Hudson B (1973) The application of stereo-techniques to electron micrographs. J Microsc 98: 396-401
JEOL (2009) Jeol Ltd. – home page. http://www.jeol.com. Accessed 30 Sep 2009
KLA-Tencor (2009) KLA-Tencor – home page. http://www-kla-tencor.com. Accessed 30 Sep 2009
Kurfess T, Hodgson TJ (2007) Metrology, sensors and control. In: Ehmann KF, Bourell D, Culpepper ML et al (eds) Micromanufacturing – international research and development. Springer, Dordrecht
Leica Mikrosysteme Vertrieb (2009) Global home: Leica Microsystems. http://www.leica-microsystems.com. Accessed 24 Sep 2009
Lonardo PM, Trumpold H, De Chiffre L (1996) Progress in 3D surface microtopography characterization. Ann CIRP 42(2):589–598
Mahr Federal (2009) Home USA – Mahr metrology. http://www.mahr.com. Accessed 29 Sep 2009
Micro Photonics (2009) Micro Photonics Inc. – home page. http://http://www.microphotonics.com/. Accessed 30 Sep 2009
Minsky M (1961) Microscopy apparatus. US Patent 3,013,467, 19 Dec 1961
Mitutoyo (2009) Mitutoyo – home page. http://http://www.mitutoyo.co.jp/index.html. Accessed 30 Sep 2009
Molesini G, Pedrini G, Poggi P et al (1984) Focus-wavelength encoded optical profilometer. Opt Commun 49:229–233
Nanonics Imaging (2009) Nanonics Imaging – home page. http://www.nanonics.co.il. Accessed 30 Sep 2009
Nanosurf (2009) Nanosurf – home page. http://www.nanosurf.com. Accessed 30 Sep 2009
Nichols JF, Shilling M, Kurfess TR (2008) Review of MEMS metrology solutions. Int J Manuf Technol Manag 13(2–4):344–359
Novacam Technologies (2009) Novacam – home page. http://www.novacam.com. Accessed 30 Sep 2009
Novascan Technologies (2009) Novascan Technologies – home page. http://www.novascan.com. Accessed 30 Sep 2009
NT-MDT (2009) NT-MDT – home page. http://www.ntmdt.com. Accessed 30 Sep 2009
Olympus (2009) Olympus – home page. http://http://www.olympus-global.com/en/global/. Accessed 30 Sep 2009
Optimet Optical Metrology (2009) Optimet – home page. http://www.optimet.co.il. Accessed 3 Oct 2009
Park Systems (2009) Park Systems – home page. http://www.parkafm.com. Accessed 30 Sep 2009
Sensofar Tech (2009) Sensofar Tech – home page. http://www.sensofar.com. Accessed 29 Sep 2009
Sirat G, Paz F (1998) Conoscopic probes are set to transform industrial metrology. Sens Rev 18(2):108–110
Solarius Development (2009) Solarius – home page. http://www.solarius-inc.com/index.html. Accessed 29 Sep 2009
Taylor Hobson (2009) Taylor Hobson – home. http://www.taylor-hobson.com. Accessed 30 Sep 2009
Thornton PR (1968) Scanning electron microscopy. Chapman and Hall, London
Veeco Instruments (2009) Veeco – solutions for a nanoscale world. http://www.veeco.com
VisiTec Microtechnik (2009) VisiTec – home page. http://http://www.visitec-em.de/. Accessed 30 Sep 2009
Weckenmann A, Estler T, Peggs G et al (2004) Probing systems in dimensional metrology. CIRP Ann Manuf Technol 53(2):657–684
Werth Messtechnik (2009) Werth Messtechnik – home page. http://http://www.werth.de. Accessed 17 Dec 2009
Zygo (2009) Zygo Corporation – home page. http://www.zygo.com. Accessed 28 Sep 2009
Standard under Development
ISO/CD 25178-1 Geometrical product specifications (GPS) – surface texture: areal – part 1: indication of surface texture. International Organization for Standardization, Geneva
ISO/CD 25178-604 Geometrical product specifications (GPS) – surface texture: areal – part 604: nominal characteristics of non-contact (coherence scanning interferometry) instruments. International Organization for Standardization, Geneva
ISO/CD 25178-605 Geometrical product specifications (GPS) – surface texture: areal – part 605: nominal characteristics of non-contact (point autofocusing) instruments. International Organization for Standardization, Geneva
ISO/DIS 25178-2 Geometrical product specifications (GPS) – surface texture: areal – part 2: terms, definitions and surface texture parameters. International Organization for Standardization, Geneva
ISO/DIS 25178-3 Geometrical product specifications (GPS) – surface texture: areal – part 3: specification operators. International Organization for Standardization, Geneva
ISO/DIS 25178-7 Geometrical product specifications (GPS) – surface texture: areal – part 7: software measurement standards. International Organization for Standardization, Geneva
ISO/DIS 25178-603 Geometrical product specifications (GPS) – surface texture: areal – part 603: nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments. International Organization for Standardization, Geneva
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Senin, N., Campatelli, G. (2011). Quality Inspection of Microtopographic Surface Features with Profilometers and Microscopes. In: Colosimo, B., Senin, N. (eds) Geometric Tolerances. Springer, London. https://doi.org/10.1007/978-1-84996-311-4_3
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DOI: https://doi.org/10.1007/978-1-84996-311-4_3
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