Abstract
Thin films of Ag layered structures, typically less than a micron in thickness, are tailored to achieve desired functional properties. Typical characterization is the instrumentations that use X-ray and ion beams to probe the properties of the film. This work discusses two techniques in thin film analysis, Rutherford backscattering spectrometry (RBS) [1],[2] and X-ray diffractrometry (XRD) [3]
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References
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(2008). Silver Thin Film Characterization. In: Silver Metallization. Engineering Materials and Processes. Springer, London. https://doi.org/10.1007/978-1-84800-027-8_2
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DOI: https://doi.org/10.1007/978-1-84800-027-8_2
Publisher Name: Springer, London
Print ISBN: 978-1-84800-026-1
Online ISBN: 978-1-84800-027-8
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