Abstract
Information in SEM images about specimen properties is conveyed when contrast in the backscattered and/or secondary electron signals is created by differences in the interaction of the beam electrons between a specimen feature and its surroundings. The resulting differences in the backscattered and secondary electron signals (S) convey information about specimen properties through a variety of contrast mechanisms. Contrast (C tr) is defined as
where is S max is the larger of the signals. By this definition, 0 ≤ C tr ≤ 1.
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References
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Goldstein, J.I., Newbury, D.E., Michael, J.R., Ritchie, N.W.M., Scott, J.H.J., Joy, D.C. (2018). SEM Image Interpretation. In: Scanning Electron Microscopy and X-Ray Microanalysis. Springer, New York, NY. https://doi.org/10.1007/978-1-4939-6676-9_7
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DOI: https://doi.org/10.1007/978-1-4939-6676-9_7
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