Computer-Aided Imaging and Interpretation

Abstract

This chapter is concerned with the acquisition, display, and interpretation of the various images which can be obtained with the SEM—e.g., secondary electron, backscattered electron, x-ray—and how the modern digital computer can be applied in the process. We will be concerned with all aspects of SEM imaging from the generation of the signal when the electron beam interacts with the specimen surface to the perception and interpretation of this information in the mind of the observer. Indeed, we will view all steps involved as an information channel which has certain imperfections and nonlinearities which must be examined in the context of an SEM application.