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Redistribution and Vaporization of Cr Impurities in Semi-Insulating GaAs

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Semi-Insulating III–V Materials

Abstract

Cr impurity redistribution and its origin in Cr-doped semi-insulating GaAs substrates annealed without encapsulation have been investigated using secondary ion mass spectrometry and flameless atomic absorption spectrometry. It is concluded that, as a result of the Cr vaporization from the substrate surface, Cr diffuses rapidly towards the surface at 800° C and above. Also, the influence of surface thermal dissociation on the Cr diffusion is discussed.

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References

  1. Barella, J. (1975). Proc. 5th Biennal Cornell Electrical Engineering Conf., p. 135. Ithaca, NY; Cornell UP

    Google Scholar 

  2. Crossley, I., Goodridge, I.H., Cardwell, M.J. and Butlin, R.S. (1977). Inst. Phys. Conf. Ser., 33b, 11

    Google Scholar 

  3. Huber, A.M., Morillot, G., Linn, N.T., Favennec, P.N., Deveaud, B. and Toulouse B. (1979). Appl. Phys. Lett, 34, 858

    Article  CAS  Google Scholar 

  4. Favennec, P.N. and L’Haridon, H. (1979). Appl. Phys. Lett., 35, 699

    Article  CAS  Google Scholar 

  5. Kasahara, J., Arai, M. and Watanabe, N. (1979). J. Electrochem. Soc., 126, 1977

    Article  Google Scholar 

  6. Immorlica, A.A. and Eisen, F.H. (1976). Appl. Phys. Lett., 29, 94

    Article  CAS  Google Scholar 

  7. Mattes, B.L., Houng, Y.M. and Pearson, G.L. (1975). J. Vac. Sci. Technol., 12, 869

    Article  CAS  Google Scholar 

  8. Cronin, G.R. and Haisty, R.W. (1964). J. Electrochem. Soc., 111, 874

    Article  CAS  Google Scholar 

  9. Smith, F.M. and Miller, R.C. (1956). Phys. Rev., 104, 1242

    Article  Google Scholar 

  10. Sato, Y. (1973). Japan. J. Appl. Phys., 12, 242

    Article  CAS  Google Scholar 

  11. Kasahara, J. and Watanabe, N. (1980). Jap. J. Appl. Phys., 19, L151

    Article  CAS  Google Scholar 

  12. Tuck, B., Adegboyega, G.A., Jay, P.R. and Cardwell, M.J. (1979). Inst. Phys. Conf. Ser., 45, 114

    Google Scholar 

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Authors and Affiliations

  1. Electronics Equipment Division, Toshiba Corporation, 1 Komukai Toshiba-Cho, Saiwai-ku, Kawasaki 210, Japan

    T. Udagawa, M. Higashiura & T. Nakanisi

Authors
  1. T. Udagawa
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  2. M. Higashiura
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  3. T. Nakanisi
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Editor information

Editors and Affiliations

  1. Plessey Research (Caswell) Ltd, UK

    G. J. Rees

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© 1980 T. Udagawa, M. Higashiura and T. Nakanisi

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Udagawa, T., Higashiura, M., Nakanisi, T. (1980). Redistribution and Vaporization of Cr Impurities in Semi-Insulating GaAs. In: Rees, G.J. (eds) Semi-Insulating III–V Materials. Birkhäuser Boston. https://doi.org/10.1007/978-1-4684-9193-7_11

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  • DOI: https://doi.org/10.1007/978-1-4684-9193-7_11

  • Publisher Name: Birkhäuser Boston

  • Print ISBN: 978-1-4684-9195-1

  • Online ISBN: 978-1-4684-9193-7

  • eBook Packages: Springer Book Archive

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