Single Defect Multiple Layer (SDML) Model

Abstract

SDSL models neglect any interrelationships between different masks, as is the case with transistors, and also neglect those defects which do not cause either a short or a break. Yet if the defect falls in the poly-diffusion area of a transistor it can be fatal even if it does not totally break the geometrical pattern. It is thus not sufficient to extract single-layer critical areas if either an accurate yield prediction or a realistic layout to fault extraction are desired.