Abstract
Chemical and semiconductor industries are using volatile organic compounds (VOCs) such as toluene, xylene, trichloro-ethylene (TCE), trichloroethane (TCA), benzene, and acetone as solvents and for substrate cleaning [1]. However, the use of VOCs poses considerable health hazards. For example, inhalation of toluene with concentrations of 600 ppm for more than eight hours causes headache and dizziness [2]. Benzene is carcinogenic at long term exposure [2].
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Jiang, C., Stark, R.H., Schoenbach, K.H. (2001). Benzene Destruction in Direct Current Atmospheric Pressure Air Glow Discharges. In: Christophorou, L.G., Olthoff, J.K. (eds) Gaseous Dielectrics IX. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-0583-9_37
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DOI: https://doi.org/10.1007/978-1-4615-0583-9_37
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