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Synthesis for Mechanical Behavior

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Optimal Synthesis Methods for MEMS

Part of the book series: Microsystems ((MICT,volume 13))

Synopsis

The mechanical elements of most of the MEMS devices are based on compliant designs such as the ones found in beams, plates, and other types of elastic structures. The advantages of single-piece, assembly-free compliant designs are well known. The extruded planar geometry of MEMS devices and almost unrestricted possibilities for shapes in the plane parallel to the substrate make it possible to develop systematic synthesis methods. This chapter describes such methods for desired mechanical attributes including stiffness, flexibility, motion, strength, natural frequencies, and normal mode shapes. Topology optimization is the main focus of the chapter but some other methods are also briefly presented. Some applications are included.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Indian Institute of Technology, Kanpur, India

    Anupam Saxena

  2. Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA, 19104, USA

    G. K. Ananthasuresh

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  1. Anupam Saxena
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  2. G. K. Ananthasuresh
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Saxena, A., Ananthasuresh, G.K. (2003). Synthesis for Mechanical Behavior. In: Optimal Synthesis Methods for MEMS. Microsystems, vol 13. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-0487-0_2

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  • DOI: https://doi.org/10.1007/978-1-4615-0487-0_2

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-5101-6

  • Online ISBN: 978-1-4615-0487-0

  • eBook Packages: Springer Book Archive

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