Volume 59 of the series The IMA Volumes in Mathematics and its Applications pp 33-73

Physics for Device Simulations and its Verification by Measurements

  • Herbert S. BennettAffiliated withSemiconductor Electronics Division, National Institute of Standards and Technology
  • , Jeremiah R. LowneyAffiliated withSemiconductor Electronics Division, National Institute of Standards and Technology

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The motivations for using computers to simulate the electrical characteristics of transistors are discussed. Our work and that of others in the area of device physics and modeling are described. We compare conventional device physics with an alternative approach to device physics that is more directly traceable to quantum-mechanical concepts. We then apply this new approach to quasi-neutral regions, space-charge regions, and regions with high levels of carrier injection. Examples of applying quantum-mechanically-based device physics to energy band diagrams for bipolar transistors are given. The limits for using theoretical results from uniform media in numerical simulations of devices with large concentration gradients are discussed. Calculations of the effective intrinsic carrier concentrations for gallium arsenide and silicon are also given along with published data. In addition, calculations of the mobilities for GaAs that are based in part on quantum-mechanical phase shifts are compared with published data. We then conclude with a discussion of the requirements for verifying and calibrating device simulators for the submicrometer domain.

Key words

gallium arsenide heavy doping effects donor-ion-carrier interactions carrier-carrier interactions Fermi energy screening radii effective intrinsic carrier concentrations scattering mechanisms phonons plasmons carrier mobilities