Skip to main content
SpringerLink
Log in

Fundamentals of Femtosecond Laser Processing

  • Chapter
  • First Online:
Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications

Part of the book series: SpringerBriefs in Applied Sciences and Technology ((BRIEFSAPPLSCIENCES))

Abstract

Femtosecond lasers have excellent characteristics for materials processing due to their ultrashort pulse widths and extremely high peak powers. When a femtosecond laser beam with a moderate pulse energy is focused into glass, multiphoton absorption or tunneling ionization is confined to a region near the focal point inside the glass. Femtosecond lasers can thus perform internal modification of glass. Internal modification is widely used to fabricate microfluidic structures and micro-optical components, which can be used to produce biomicrochips for biochemical analysis. This chapter reviews the fundamentals and characteristics of femtosecond laser processing. It also introduces state-of-the-art femtosecond laser processing.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Srinivasan R, Sutcliffe E, Braren B (1987) Ablation and etching of polymethylmethacrylate by very short (160 fs) ultraviolet (308 nm) laser pulses. Appl Phys Lett 51:1285–1287

    Article  Google Scholar 

  2. Küper S, Stuke M (1987) Femtosecond uv excimer laser ablation. Appl Phys B 44:99–204

    Article  Google Scholar 

  3. Küper S, Stuke M (1989) Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV exicimer laser pulses. Appl Phys Lett 54:4–6

    Article  Google Scholar 

  4. Küper S, Stuke M (1989) Ablation of uv-transparent materials with femtosecond UV excimer laser pulses. Microelectron Eng 9:475–480

    Article  Google Scholar 

  5. Momma C, Chichkov BN, Nolte S et al (1996) Short-pulse laser ablation of solid targets. Opt Commun 129:134–142

    Article  Google Scholar 

  6. Yanik MF, Cinar H, Cinar HN et al (2004) Neurosurgery: functional regeneration after laser axotomy. Nature 432:822–822

    Article  Google Scholar 

  7. Barsch N, Korber K, Ostendorf A et al (2003) Ablation and cutting of planar silicon devices using femtosecond laser pulses. Appl Phys A 77:237–242

    Google Scholar 

  8. Nakata Y, Okada T, Maeda M (2002) Fabrication of dot matrix, comb, and nanowire structures using laserablation by interfered femtosecond laser beams. Appl Phys Lett 81:4239–4241

    Article  Google Scholar 

  9. Reif J, Costache F, Henyk M et al (2002) Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics. Appl Surf Sci 197–198:891–895

    Article  Google Scholar 

  10. Wu Q, Ma Y, Fang R et al (2003) Femtosecond laser-induced periodic surface structure on diamond film. Appl Phys Lett 82:1703–1705

    Article  Google Scholar 

  11. Rudolph P, Kautek W (2004) Composition influence of non-oxidic ceramics on self-assembled nanostructures due to fs-laser irradiation. Thin Solid Films 453–454:537–541

    Article  Google Scholar 

  12. Miyaji G, Miyazaki K (2006) Ultrafast dynamics of periodic nanostructure forma-tion on diamondlikecarbon films irradiated with femtosecond laser pulses. Appl Phys Lett 89:191902

    Article  Google Scholar 

  13. Davis KM, Miura K, Sugimoto N et al (1996) Writing waveguides in glass with a femtosecond laser. Opt Lett 21:1729–1731

    Article  Google Scholar 

  14. Glezer EN, Milosavljevic M, Huang L et al (1996) Three-dimensional optical storage inside transparent materials. Opt Lett 21:2023–2025

    Article  Google Scholar 

  15. Watanabe W, Sowa S, Tamaki T et al (2006) Three-dimensional waveguides fabricated in poly(methyl methacrylate) by a femtosecond laser. Jpn J Appl Phys 45:L765–L767

    Article  Google Scholar 

  16. Hanada Y, Sugioka K, Midorikawa K (2010) UV waveguides light fabricated in fluoropolymer CYTOP by femtosecond laser direct writing. Opt Express 18:446–450

    Article  Google Scholar 

  17. Kawata S, Sun HB, Tanaka T et al (2001) Finer features for functional microdevices. Nature 412:697–698

    Article  Google Scholar 

  18. Fan WS, Storz R, Tom HWK et al (1992) Electron thermalization in gold. Phys Rev B 46:13592–13595

    Article  Google Scholar 

  19. Sun CK, Vallée F, Acioli LH et al (1994) Femtosecond-tunable measurement of electron thermalization in gold. Phys Rev B 50:15337–15348

    Article  Google Scholar 

  20. Wellershoff SS, Hohlfeld J, Güdde J et al (1999) The role of electron-phonon coupling in femtosecond laser damage of metals. Appl Phys A 69:S99–S107

    Google Scholar 

  21. Hohlfeld J, Wellershoff SS, Güdde J et al (2000) Electron and lattice dynamics following optical excitation of metals. Chem Phys 251:237–258

    Article  Google Scholar 

  22. Anisimov SI, Rethfeld B (1997) Theory of ultrashort laser pulse interaction with a metal. Proc SPIE 3093:192–203

    Article  Google Scholar 

  23. Corkum PB, Brunel F, Sherman NK et al (1988) Thermal response of metals to ultrashort pulse laser excitation. Phys Rev Lett 61:2886–2889

    Article  Google Scholar 

  24. Fujita M, Hashida M (2004) Applications of femtosecond lasers. Oyo Buturi 73:178–185 (in Japanese)

    Google Scholar 

  25. Keldysh LV (1965) Ionization in field of a strong electromagnetic wave. Sov Phys JETP 20:1307–1314

    MathSciNet  Google Scholar 

  26. Mao SS, Quere F, Guizard S et al (2004) Dynamics of femtosecond laser interactions with dielectrics. Appl Phys A 79:1695–1709

    Article  Google Scholar 

  27. Chichkov BN, Momma C, Nolte S et al (1996) Femtosecond, picosecond and nanosecond laser ablation of solids. Appl Phys A 63:109–115

    Article  Google Scholar 

  28. Nakashima S, Sugioka K, Midorikawa K (2010) Enhancement of resolution and quality of nano-hole structure on GaN substrates using the second-harmonic beam of near-infrared femtosecond laser. Appl Phys A 101:475–481

    Article  Google Scholar 

  29. Nakashima S, Sugioka K, Ito T et al (2011) Fabrication of high-aspect-ratio nanohole arrays on GaN surface by using wet-chemical-assisted femtosecond laser ablation. J Laser Micro/Nanoeng 6:15–19

    Article  Google Scholar 

  30. Nakata Y, Okada T, Maeda M (2003) Nano-sized hollow bump array generated by single femtosecond laser pulse. Jpn J Appl Phys 42:L1452–L1454

    Article  Google Scholar 

  31. Nakata Y, Okada T, Maeda M (2004) Lithographical laser ablation using femto-second laser. Appl Phys A 79:1481–1483

    Google Scholar 

  32. Nakata Y, Miyanaga N, Okada T (2007) Effect of pulse width and fluence of femtosecond laser on the size of nanobump array. Appl Surf Sci 253:6555–6557

    Article  Google Scholar 

  33. Nakata Y, Tsuchida K, Miyanaga N et al (2009) Liquidly process in femtosecond laser processing. Appl Surf Sci 255:9761–9763

    Article  Google Scholar 

  34. Nakata Y, Hiromoto T, Miyanaga N (2009) Frozen water drops in the nanoworld. SPIE Newsroom. doi:10.1117/2.1200906.1708

    Google Scholar 

  35. Nakata Y, Momoo K, Hiromoto T et al (2011) Generation of superfine structure smaller than 10 nm by interfering femtosecond laser processing. Proc SPIE 7920:79200B

    Article  Google Scholar 

  36. Watanabe W, Asano T, Yamada K et al (2003) Wavelength division with three-dimensional couplers fabricated by filamentation of femtosecond laser pulses. Opt Lett 28:2491–3493

    Article  Google Scholar 

  37. Sudrie L, Winick KA (2003) Fabrication and characterization of photonic devices directly written in glass using femtosecond laser pulses. J Lightwave Technol 21:246–253

    Article  Google Scholar 

  38. Bricchi E, Mills JD, Kazamsky PG et al (2002) Birefringent Fresnel zone plates in silica fabricated by femtosecond laser machining. Opt Lett 27:2200–2202

    Article  Google Scholar 

  39. Valle GD, Taccheo S, Osellame R et al (2007) 1.5μm single longitudinal mode waveguide laser fabricated by femtosecond laser writing. Opt Express 84:3190–3194

    Article  Google Scholar 

  40. Marcinkevicius A, Juodkazis S, Watanabe M et al (2001) Femtosecond laser-assisted three-dimensional microfabrication in silica. Opt Lett 26:277–279

    Article  Google Scholar 

  41. Masuda M, Sugioka K, Cheng Y et al (2003) 3-D microstructuring inside photosensitive glass by femtosecond laser excitation. Appl Phys A 76:857–860

    Article  Google Scholar 

  42. Sugioka K, Cheng Y, Midorikawa K (2005) Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture. Appl Phys A 81:1–10

    Article  Google Scholar 

  43. Sugioka K, Hanada Y, Midorikawa K (2010) Three-dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips. Laser Photon Rev 4:386–400

    Article  Google Scholar 

  44. Sugioka K, Cheng Y (2011) Integrated microchips for biological analysis fabricated by femtosecond laser direct writing. MRS Bull 36:1020–1027

    Article  Google Scholar 

  45. Sugioka K, Cheng Y (2011) Femtosecond laser processing for optofluidic fabrication. Lab Chip 12:3576–3589

    Article  Google Scholar 

  46. Cumpston B, Ananthavel S, Barlow S et al (1999) Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication. Nature 398:51–54

    Article  Google Scholar 

  47. Sun HB, Matsuo S, Misawa H (1999) Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin. Appl Phys Lett 74:786–788

    Article  Google Scholar 

  48. Serbin J, Ovsianikov A, Chichkov B (2004) Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties. Opt Express 12:5221–5228

    Article  Google Scholar 

  49. Maruo S, Inoue H (2006) Optically driven micropump produced by three-dimensional two-photon microfabrication. Appl Phys Lett 89:144101

    Article  Google Scholar 

  50. Maruo S, Inoue H (2007) Optically driven viscous micropump using a rotating microdisk. Appl Phys Lett 91:084101

    Article  Google Scholar 

  51. Tian Y, Zhang YL, Ku JF et al (2010) High performance magnetically controllable microturbines. Lab Chip 10:2902–2905

    Article  Google Scholar 

  52. Wang J, He Y, Xia H et al (2010) Embellishment of microfluidic devices via femtosecond laser micronanofabrication for chip functionalization. Lab Chip 10:1993–1996

    Article  Google Scholar 

  53. Wu D, Chen QD, Niu LG et al (2009) Femtosecond laser rapid prototyping of nanoshells and suspending components towards microfluidic devices. Lab Chip 9:2391–2394

    Article  Google Scholar 

  54. Ovsianikov A, Malinauskas M, Schlie S et al (2011) Three-dimensional laser micro- and nano-structuring of acrylated poly(ethylene glycol) materials and evaluation of their cytoxicity for tissue engineering applications. Acta Biomater 7:967–974

    Article  Google Scholar 

  55. Farsari M, Chichkov B (2009) Two-photon fabrication. Nature Photon 3:450–452

    Article  Google Scholar 

  56. Tan DF, Li Y, Qi FG et al (2007) Reduction in feature size of two-photon polymerization using SCR500. Appl Phys Lett 90:071106

    Article  Google Scholar 

  57. Sakabe S, Hashida M, Tokita S et al (2009) Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse. Phys Rev B 79:033409

    Article  Google Scholar 

  58. Yasumaru N, Miyazaki K, Kiuchi J (2003) Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC. Appl Phys A 76:983–985

    Article  Google Scholar 

  59. Borowiec A, Hauge HK (2003) Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses. Appl Phys Lett 82:4462–4464

    Article  Google Scholar 

  60. Costache F, Henyk M, Reif J (2003) Surface patterning on insulators upon femtosecond laser ablation. Appl Surf Sci 208:486–491

    Article  Google Scholar 

  61. Her TH, Finlay RJ, Wu C et al (1998) Microstructuring of silicon with femtosecond laser pulses. Appl Phys Lett 73:1673–1675

    Article  Google Scholar 

  62. Baldacchini T, Carey JE, Zhou M et al (2006) Superhydrophobic surfaces prepared by microstructuring of silicon using a femtosecond laser. Langmuir 22:4917–4919

    Article  Google Scholar 

  63. Carey JE, Crouch CH, Shen M et al (2005) Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes. Opt Lett 30:1773–1775

    Article  Google Scholar 

  64. Younkin R, Carey JE, Mazur E et al (2003) Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses. J Appl Phys 93:2626–2629

    Article  Google Scholar 

  65. Wang F, Chen C, He H et al (2011) Analysis of sunlight loss for femtosecond laser microstructed silicon and its solar cell efficiency. Appl Phys A 103:977–982

    Article  Google Scholar 

  66. Zorba V, Stratakis E, Barberoglou M et al (2008) Biomimetic artificial surfaces quantitatively reproduce the water repellency of a lotus leaf. Adv Mater 20:4049–4054

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Laser Technology Laboratory, RIKEN, Saitama, Japan

    Koji Sugioka

  2. State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, People’s Republic of China

    Ya Cheng

Authors
  1. Koji Sugioka
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Ya Cheng
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Koji Sugioka .

Rights and permissions

Reprints and permissions

Copyright information

© 2014 The Author(s)

About this chapter

Cite this chapter

Sugioka, K., Cheng, Y. (2014). Fundamentals of Femtosecond Laser Processing. In: Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications. SpringerBriefs in Applied Sciences and Technology. Springer, London. https://doi.org/10.1007/978-1-4471-5541-6_3

Download citation

  • DOI: https://doi.org/10.1007/978-1-4471-5541-6_3

  • Published:

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-4471-5540-9

  • Online ISBN: 978-1-4471-5541-6

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics

Search

Navigation