Abstract
The primary goal of this book is to comprehensively review state-of-the-art femtosecond laser three-dimensional (3D) micromachining techniques for microfluidic and optofluidic applications, including techniques for fabricating microfluidic components, optical waveguides, free-space micro-optical components, microelectrodes, and integrated optofluidic systems and devices. It also presents typical examples of applications of femtosecond-laser-fabricated microfluidic and optofluidic chips for chemical sensing and investigating biological species. Comparison with conventional lithography-based fabrication techniques reveals the uniqueness and versatility of femtosecond laser micromachining. In this chapter, we summarize the results and contributions presented in this book and overview the future outlook of this field.
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References
Napoli M, Eijkel JCT, Pennathur S (2010) Nanofluidic technology for biomolecule applications: a critical review. Lab Chip 10:957–985
Abgrall P, Nguyen NT (2008) Nanofluidic devices and their applications. Anal Chem 80:2326–2341
Kazansky PG, Yang W, Bricchi E et al (2007) “Quill” writing with ultrashort light pulses in transparent materials. Appl Phys Lett 90:151120(3)
Vitek DN, Block E, Bellouard Y (2010) Spatio-temporally focused femtosecond laser pulses for nonreciprocal writing in optically transparent materials. Opt Express 18:24673–24678
Yang WJ, Kazansky PG, Svirko YP (2008) Non-reciprocal ultrafast laser writing. Nat Photonics 2:99–104
He F, Xu H, Cheng Y et al (2010) Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses. Opt Lett 35:1106–1108
Durfee CG, Greco M, Block E et al (2012) Intuitive analysis of space-time focusing with double-ABCD calculation. Opt Express 20:14244–14259
Stoian R, Boyle M, Thoss A et al (2002) Laser ablation of dielectrics with temporally shaped femtosecond pulses. Appl Phys Lett 80:353–355
Kiyama S, Matsuo S, Hashimoto S et al (2009) Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates. J Phys Chem C 113:11560–11566
Thorsen T, Maerkl SJ, Quake SR (2002) Microfluidic Large Scale Integration. Science 298:580–584
Liao Y, Ju Y, Zhang L et al (2010) Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing. Opt Lett 35:3225–3227
Liao Y, Song J, Li E (2012) Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing. Lab Chip 12:746–749
Tünnermann A, Schreiber T, Limpert J et al (2010) Fiber lasers and amplifiers: an ultrafast performance evolution. Appl Opt 49:F71–F78
Psaltis D, Quake SR, Yang C (2006) Developing optofluidic technology through the fusion of microfluidics and optics. Nature 442:381–386
Monat C, Domachuk P, Eggleton BJ (2007) Integrated optofluidics: a new river of light. Nat Photonics 1:106–114
Erickson D, Sinton D, Psaltis D (2011) Optofluidics for energy applications. Nat Photonics 5:583–590
Zhou Z, Xu J, Cheng Y (2008) Surface-enhanced Raman scattering substrate fabricated by femtosecond laser direct writing. Jpn J Appl Phys 47:189–192
Sugioka K, Cheng Y, Midorikawa K (2007) “All-in-One” Chip Fabrication by 3D Femtosecond Laser Microprocessing for Biophotonics. J Phys: Conf Ser 59:533–538
Balslev S, Jorgensen AM, Bilenberg B (2006) Lab-on-a-chip with integrated optical transducers. Lab Chip 6:213–217
Sugioka K, Cheng Y (2011) Integrated microchips for biological analysis fabricated by femtosecond laser direct writing. MRS Bull 36:1020–1027
Osellame R, Hoekstra HJWM, Cerullo1 G et al (2011) Femtosecond laser microstructuring: an enabling tool for optofluidic lab-on-chips. Laser Photonics Rev 5:442–463
Schaap A, Rohrlack T, Bellouard Y (2012) Lab on a chip technologies for algae detection: a review. J Biophotonics 5:8–9
Sugioka K, Cheng Y (2012) Femtosecond laser processing for optofluidic fabrication. Lab Chip 12:3576–3589
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Sugioka, K., Cheng, Y. (2014). Summary and Outlook. In: Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications. SpringerBriefs in Applied Sciences and Technology. Springer, London. https://doi.org/10.1007/978-1-4471-5541-6_10
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DOI: https://doi.org/10.1007/978-1-4471-5541-6_10
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Publisher Name: Springer, London
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Online ISBN: 978-1-4471-5541-6
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