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System Integration

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Silicon Carbide Microsystems for Harsh Environments

Part of the book series: MEMS Reference Shelf ((MEMSRS,volume 22))

Abstract

A microsystem is a collection of integrated devices that contains MEMS (sensors, actuators, and timing devices), electronics (control, sense, and data processing), communication (wired or wireless), and a power source. Figure 6.1 schematically illustrates a complete autonomous microsystem. Realization of all these components into a single system is rather complex. Several integration approaches have been used or proposed for conventional microsystems. Application requirements, performance advantages, manufacturability, and cost advantages drive which integration route is ultimately used.

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Authors and Affiliations

  1. Automation & Robotics Research Institute, The University of Texas at Arlington, Arlington, Texas, USA

    Muthu B. J. Wijesundara

  2. Proteus Biomedical Inc., Redwood City, California, USA

    Robert G. Azevedo

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  1. Muthu B. J. Wijesundara
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Correspondence to Muthu B. J. Wijesundara .

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Wijesundara, M.B.J., Azevedo, R.G. (2011). System Integration. In: Silicon Carbide Microsystems for Harsh Environments. MEMS Reference Shelf, vol 22. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-7121-0_6

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