Skip to main content

Transparent Amorphous Oxide Semiconductors for Flexible Electronics

  • Chapter
  • First Online:
Handbook of Transparent Conductors

Abstract

Transparent amorphous oxide semiconductors have large electron mobility comparable to that in the corresponding crystalline materials and conductivity is continuously controllable from the almost insulating state to the degenerate state. Thin film transistors employing these materials as the channel layer exhibit excellent performance, mobility and stability, notwithstanding that they can be easily fabricated by the conventional sputtering technique at low temperatures. Extensive research is going on aiming at application to the backplane to drive next generation flat panel displays. This chapter describes the fundamentals of these materials and application to displays.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 219.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Hardcover Book
USD 279.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. N.F. Mott and E.A. Davis, Electronic Processes in Non-Crystalline Materials, Clarendon Press, Oxford (1979).

    Google Scholar 

  2. S.R. Elliott, Physics of Amorphous Materials, 2nd Edn. Wiley, New York (1990).

    Google Scholar 

  3. W.E. Spear and P.G. LeComber, Solid State Commun. 17, 1193(1975).

    Article  Google Scholar 

  4. P.G. LeComber, W.E. Spear, and A. Gaith, Electron. Lett. 15, 179(1979).

    Article  Google Scholar 

  5. E.P. Denton, H. Rawson, and J.E. Stanworth, Nature 173, 1030(1954).

    Article  Google Scholar 

  6. I.G. Austin and N.F. Mott, Adv. Phys. 18, 41(1969).

    Article  Google Scholar 

  7. C.D. Dimitrakopoulos and D.J. Mascaro, IBM J. Res. Dev. 45, 11(2001).

    Article  Google Scholar 

  8. H. Hosono, T. Kamiya, and M. Hirano, Bull. Chem. Soc. Jpn. 79, 1(2006).

    Article  Google Scholar 

  9. H. Ohta and H. Hosono, Mater. Today 4, 42(2004).

    Article  Google Scholar 

  10. T. Kamiya and H. Hosono, Semicond. Sci. Technol. 20, S92(2005)

    Article  Google Scholar 

  11. H. Hosono, M. Yasukawa, and H. Kawazoe, J. Non-Cryst. Solids 203, 338(1996).

    Article  Google Scholar 

  12. H. Hosono, N. Kikuchi, N. Ueda, and H. Kawazoe, J. Non-Cryst. Solids 198–200, 165(1996).

    Article  Google Scholar 

  13. H. Hosono, J. Non-Cryst. Solids 352, 851(2006).

    Article  Google Scholar 

  14. M. Orita, H. Ohta, M. Hirano, S. Narushima, and H. Hosono, Philos. Mag. B 81, 501(2001).

    Article  Google Scholar 

  15. A. Zunger, Appl. Phys. Lett. 83, 57(2003).

    Article  Google Scholar 

  16. P. Gorn et al., Appl. Phys. Lett. 9, 063502(2007).

    Article  Google Scholar 

  17. E.M.C. Fortunate et al., Appl. Phys. Lett. 92, 222103(2008).

    Article  Google Scholar 

  18. H.Q. Ching et al., J. Non-Cryst. Solids 354, 2826(2008).

    Article  Google Scholar 

  19. H. Hosono, K. Nomura, Y. Ogo, T. Uruga, and T. Kamiya, J. Non-Cryst. Solids 354, 2796(2008).

    Article  Google Scholar 

  20. Y. Ogo et al., Phys. Stat. Sol. Phys. Stat. Solidi (a) 205, 1920(2008).

    Article  Google Scholar 

  21. J. Robertson, J. Non-Cryst. Solids 354, 2791(2008).

    Article  Google Scholar 

  22. H. Hosono, Y. Yamashita, N. Ueda, H. Kawazoe, and K. Shimizu, Appl. Phys. Lett. 68, 661(1996).

    Article  Google Scholar 

  23. M. Yasukawa, H. Hosono, N. Ueda, and H. Kawazoe, Jpn. J. Appl. Phys. 34, L281(1996).

    Article  Google Scholar 

  24. E. Fortunate, A. Pimentel, A. Goncalves, A. Marques, and R. Martins, Jpn. J. Appl. Phys. 502, 104(2006).

    Google Scholar 

  25. B. Yaglioglu,Y.-J. Huang, H.-Y. Yeom, and D.C. Paine, Jpn. J. Appl. Phys. 496, 89(2006).

    Google Scholar 

  26. B. Kumar, H. Gong, and R. Akkipeddi, J. Appl. Phys. 98, 073703(2005).

    Article  Google Scholar 

  27. K. Utsumo, H. Iigusa, R. Tokumaru, P.K. Song, and Y. Shigesato, Thin Solid Films, 445, 229(2003).

    Article  Google Scholar 

  28. T. Minami, Semicond. Sci. Technol. 20, S35(2005).

    Article  Google Scholar 

  29. J. Wager, D.A. Keszler, and R.E. Presley, Transparent Electronics, Springer, New York (2008).

    Google Scholar 

  30. S. Narushima, H. Hosono, J. Jisun, T. Yoko, and K. Shimakawa, J. Non-Cryst. Solids 274, 313(2000).

    Article  Google Scholar 

  31. C.G. Van de Walle and J. Neugebauer, Nature 423, 626(2003).

    Article  Google Scholar 

  32. R. Hayashi, SID’08 Digest 621(2008).

    Google Scholar 

  33. A. Sato et al., Appl. Phys. Lett. 94, 133502(2009).

    Google Scholar 

  34. J. Park et al., Appl. Phys. Lett. 93, 053501(2008).

    Google Scholar 

  35. K. Shimakawa, S. Narushima, H. Hosono, and H. Kawazoe, Philos. Mag. Lett. 79, 755(1999).

    Article  Google Scholar 

  36. A. Takagi, K. Nomura, H. Ohta, H. Yanagi, T. Kamiya, M. Hirano, and H. Hosono, Thin Solid Films 486, 38(2005).

    Article  Google Scholar 

  37. M. K. Jayaraj, K.J. Saji, K. Nomura, T. Kamiya, and H. Hosono, J. Vac. Sci. Technol. B 26, 495(2008).

    Article  Google Scholar 

  38. L. Friedman, J. Non-Cryst. Solids 6, 329(1971).

    Article  Google Scholar 

  39. S. Narushima, M. Orita, M. Hirano, and H. Hosono, Phys. Rev. B 66, 035203(2002).

    Article  Google Scholar 

  40. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature 432, 488 (2004).

    Article  Google Scholar 

  41. M. Orita, H. Hiramatsu, H. Ohta, M. Hirano, and H. Hosono, Thin Solid Films 411, 134(2002).

    Article  Google Scholar 

  42. R. Doremus, Glass Science, Wiley, New York (1994).

    Google Scholar 

  43. K. Nomura, A. Takagi, T. Kamiya, H. Ohta, M. Hirano, and H. Hosono, Jpn. J. Appl. Phys. 45, 4303(2006).

    Article  Google Scholar 

  44. K. Nomura, T. Kamiya, H. Ohta, T. Uruga, M. Hirano, and H. Hosono, Phys. Rev. B 75, 035212(2007).

    Article  Google Scholar 

  45. D.K. Schroder, Semiconductor Materials and Device Characterization, Wiley, New York (2006).

    Google Scholar 

  46. H. Yabuta, M. Sano, K. Abe, T. Aiba, T. Den, H. Kumomi, K. Nomura, T. Kamiya, and H. Hosono, Appl. Phys. Lett. 89, 112123(2006).

    Article  Google Scholar 

  47. H. Kumomi, K. Nomura, T. Kamiya, and H. Hosono, Thin Solid Films 516, 1516(2008).

    Article  Google Scholar 

  48. J.K. Jeong, J.H. Jeong, H.W. Yang, J-S. Park, Y-G. Mo, and H.D. Kim, Appl. Phys. Lett. 91, 113505(2007).

    Article  Google Scholar 

  49. H.Q. Chiang, B.R. McFarlane, D. Hong, R.E. Presley, and J.F. Wager, J. Non-Cryst. Solids 354, 2826(2008).

    Article  Google Scholar 

  50. W. Lim, S.H. Kim, Y-L. Wang, J.W. Lee, D.P. Norton, S.J. Pearton, F. Ren, and I.I. Kravchenko, J. Electrochem. Soc. 155, H383(2008).

    Article  Google Scholar 

  51. J.H. Jeong, H.W. Yang, J-S. Park, J.K. Jeong, Y-G. Mo, H.D. Kim, J. Song, and C.S. Hwang, Electrochem. Solid State Lett. 11, H157(2008).

    Article  Google Scholar 

  52. P.F. Carcia, R.S. McLean, M.H. Reily, and G. Nunes, Appl. Phys. Lett. 82, 1117(2003).

    Article  Google Scholar 

  53. R. Martins, P. Barquinha, A. Pimentel, L. Pereira, and E. Fortunate, Phys. Stat. Solidi A202, R95(2005).

    Google Scholar 

  54. J.R. Bellingham, A.P. Mackenzie, and W.A. Phillips, App. Phys. Lett. 58, 2506(1991).

    Article  Google Scholar 

  55. P.K. Song, Y. Shigesato, M. Kamei, and I. Yasui, Jpn. J. Appl. Phys. 38, 2921(1999).

    Article  Google Scholar 

  56. B. Yaglioglu, Y-J. Huang, H-Y. Yeom, and D.C. Paine, Thin Solid Films, 496, 89(2006).

    Article  Google Scholar 

  57. A.J. Leenheer, J.D. Perkins, M.F.A.M. Van Hest, J.J. Berry, R.P. O’Hayre, and D.S. Ginley, Phys. Rev. B 77, 115215(2008).

    Article  Google Scholar 

  58. H. Hosono, M. Kurita, and H. Kawazoe, Jpn. J. Appl. Phys. 37, L1119(1998).

    Article  Google Scholar 

  59. H. Hosono, M. Kurita, and H. Kawazoe, Thin Solid Films 351, 137(1999).

    Article  Google Scholar 

  60. P. Gorren et al., Appl. Phys. Lett. 90, 063502(2007).

    Article  Google Scholar 

  61. P. Gorren et al., Adv. Mater. 17, 590(2005).

    Article  Google Scholar 

  62. R. Hayashi et.al. J. SID 15, 915(2007).

    Google Scholar 

  63. M. Ito et al., IEICE Trans. Electron. E90-C, 2105(2007).

    Article  Google Scholar 

  64. M. Ito et al., J. Non-Cryst. Solids 354, 2777(2008).

    Article  Google Scholar 

  65. H.-N. Lee et al., J. SID 16/2, 265(2008).

    Google Scholar 

  66. M.-C. Sung et al., IMID’07 Digest 133(2007).

    Google Scholar 

  67. J.K. Jeong et al., SID Digest’08 1(2008).

    Google Scholar 

  68. K.-S. Son et al., SID Digest’08 633(2008).

    Google Scholar 

  69. I. Sing et al., IEEE Electron Device Lett. 29, 549(2008).

    Article  Google Scholar 

  70. D-H. Lee, Y-J. Chang, G.S. Herman, and C-H. Chang, Adv. Mater. 19, 843(2007).

    Article  Google Scholar 

  71. Y. Sun and J.A. Rogers, Adv. Mater. 189, 1897(2007).

    Article  Google Scholar 

  72. M.K. Ryu et al., SID’09 Digest 188(2009).

    Google Scholar 

  73. S. Narushima, K. Ueda, H. Mizoguchi, H. Ohta, M. Hirano, K. Shimizu, T. Kamiya, and H. Hosono, Adv. Mater. 15, 1409(2003).

    Article  Google Scholar 

  74. T. Kamiya, S. Narushima, H. Mizoguchi, K. Shimizu, H. Ohta, M. Hirano, and H. Hosono, Adv. Funct. Mater. 15, 968(2005).

    Article  Google Scholar 

  75. Y. Ogo et al., Appl. Phys. Lett. 93, 032113(2008).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Hideo Hosono .

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2011 Springer US

About this chapter

Cite this chapter

Hosono, H. (2011). Transparent Amorphous Oxide Semiconductors for Flexible Electronics. In: Ginley, D. (eds) Handbook of Transparent Conductors. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-1638-9_13

Download citation

  • DOI: https://doi.org/10.1007/978-1-4419-1638-9_13

  • Published:

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4419-1637-2

  • Online ISBN: 978-1-4419-1638-9

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics