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Polymeric Microelectromechanical Millimeter Wave Systems

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RF and Microwave Microelectronics Packaging
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Abstract

Polymeric millimeter-wave components and systems based on micro molding technologies have been demonstrated, including waveguides, iris filters, tunable filters, phase shifters, waveguide-fed horn antennas and waveguide-based feeding networks. Fundamental issues in polymer metallization process such as conformal and uniform deposition as well as mass transfer and current density effects on the novel in-channel electroplating encapsulation, surface morphology and roughness on mm-wave attenuation will be discussed in detail. We believe this new class of polymeric millimeter-wave systems has potential applications in replacing the expensive metallic counterparts (a few thousand dollars for each waveguide) in current millimeter-wave systems.

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Correspondence to Yiin-Kuen Fuh .

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Fuh, YK., Sammoura, F., Jiang, Y., Lin, L. (2010). Polymeric Microelectromechanical Millimeter Wave Systems. In: Kuang, K., Kim, F., Cahill, S. (eds) RF and Microwave Microelectronics Packaging. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-0984-8_3

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