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Sensors and Actuators on CMOS Platforms

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More than Moore

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Abstract

The monolithic or hybrid integration of sensors and actuators (S&A) onto CMOS platforms is of great importance to reduce the device size and cost as well as to facilitate new functionalities and better performance. Hence, S&As on CMOS platforms are important and convincing examples of “more than Moore.” This chapter focuses on a broad range of aspects of S&As on CMOS platforms. First, the basic concept is introduced, followed by a detailed description of the fundamentals of current S&A concepts. The current market situation is then described, demonstrating the great opportunities for S&As. A substantial part of the chapter is devoted to the various techniques and fabrication processes for monolithic and hybrid integration of S&As on CMOS. Successful examples of very large-scale integration (VLSI) ofS&As on CMOS platforms are also described. Current research into the use nanostructures for new or better S&A functionalities or improved performance is described in an additional subsection. Finally, the equally important back-end-of-the-line aspects in large-volume production, packaging, and testing are presented. The chapter closes with the authors’ outlook and view on the challenges and opportunities in research, development, production, and marketing of new and better S&As, VLSI-type S&As on single-chip CMOS platforms, and S&A networks.

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Acknowledgment

With great pleasure and appreciation, the authors acknowledge the encouragement of Paul Seidler and Werner Bux, the Department Managers of Science & Technology and Systems, respectively, and the editorial support of Charlotte Bolliger from the Publications Group of the IBM Zurich Research Laboratory. In addition, numerous interesting and stimulating discussions and collaborations with the many colleagues from the teams at IBM and STMicroelectronics were important cornerstones for the content of this chapter. Thank you all very much.

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Authors and Affiliations

  1. IBM Zurich Research Laboratory, 8803, Rüschlikon, Switzerland

    Mark Lantz, Christoph Hagleitner, Michel Despont & Peter Vettiger

  2. MEMS & Healthcare Product Division, STMicroelectronics, 20010, Cornaredo (Milano), Italy

    Mario Cortese & Benedetto Vigna

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  1. Mark Lantz
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  2. Christoph Hagleitner
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Correspondence to Mark Lantz .

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  1. NXP Semiconductors, Eindhoven, 5656 AG, Netherlands

    Guo Qi Zhang

  2. NXP Semiconductors, Eindhoven, 5656 AG, Netherlands

    Alfred Roosmalen

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Lantz, M., Hagleitner, C., Despont, M., Vettiger, P., Cortese, M., Vigna, B. (2009). Sensors and Actuators on CMOS Platforms. In: Zhang, G., Roosmalen, A. (eds) More than Moore. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-75593-9_5

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