Summary
Scanning probe microscopy (SPM) provides nanometer-scale mapping of numerous sample properties in essentially any environment. This unique combination of high resolution and broad applicability has lead to the application of SPM to many areas of science and technology, especially those interested in the structure and properties of materials at the nanometer scale. SPM images are generated through measurements of a tip-sample interaction. A well-characterized tip is the key element to data interpretation and is typically the limiting factor.
Commercially available atomic force microscopy (AFM) tips, integrated with force sensing cantilevers, are microfabricated from silicon and silicon nitride by lithographic and anisotropic etching techniques. The performance of these tips can be characterized by imaging nanometer-scale standards of known dimension, and the resolution is found to roughly correspond to the tip radius of curvature, the tip aspect ratio, and the sample height. Although silicon and silicon nitride tips have a somewhat large radius of curvature, low aspect ratio, and limited lifetime due to wear, the widespread use of AFM today is due in large part to the broad availability of these tips. In some special cases, small asperities on the tip can provide resolution much higher than the tip radius of curvature for low-Z samples such as crystal surfaces and ordered protein arrays.
Several strategies have been developed to improve AFM tip performance. Oxide sharpening improves tip sharpness and enhances tip asperities. For high-aspect-ratio samples such as integrated circuits, silicon AFM tips can be modified by focused ion beam (FIB) milling. FIB tips reach three-degree cone angles over lengths of several microns and can be fabricated at arbitrary angles. Other high resolution and high-aspect-ratio tips are produced by electron beam deposition (EBD) in which a carbon spike is deposited onto the tip apex from the background gases in an electron microscope. Finally, carbon nanotubes have been employed as AFM tips. Their nanometer-scale diameter, long length, high stiffness, and elastic buckling properties make carbon nanotubes possibly the ultimate tip material for AFM. Nanotubes can be manually attached to silicon or silicon nitride AFM tips or “grown” onto tips by chemical vapor deposition (CVD), which should soon make them widely available. In scanning tunneling microscopy (STM), the electron tunneling signal decays exponentially with tip-sample separation, so that in principle only the last few atoms contribute to the signal. STM tips are, therefore, not as sensitive to the nanoscale tip geometry and can be made by simple mechanical cutting or electrochemical etching of metal wires. In choosing tip materials, one prefers hard, stiff metals that will not oxidize or corrode in the imaging environment.
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References
R. Linnemann, T. Gotszalk, I. W. Rangelow, P. Dumania, and E. Oesterschulze. Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers. J. Vac. Sci. Technol. B, 14(2):856–860, 1996.
T. R. Albrecht, S. Akamine, T. E. Carver, and C. F. Quate. Microfabrication of cantilever styli for the atomic force microscope. J. Vac. Sci. Technol. A, 8(4):3386–3396, 1990.
O. Wolter, T. Bayer, and J. Greschner. Micromachined silicon sensors for scanning force microscopy. J. Vac. Sci. Technol. B, 9(2):1353–1357, 1991.
C. Bustamante and D. Keller. Scanning force microscopy in biology. Phys. Today, 48(12):32–38, 1995.
J. Vesenka, S. Manne, R. Giberson, T. Marsh, and E. Henderson. Colloidal gold particles as an incompressible atomic force microscope imaging standard for assessing the compressibility of biomolecules. Biophys. J., 65:992–997, 1993.
C. L. Cheung C. M. Lieber J. H. Hafner. Unpublished results, 2001.
J. H. Hafner, C. L. Cheung, T. H. Oosterkamp, and C. M. Lieber. High-yield assembly of individual single-walled carbon nanotube tips for scanning probe microscopies. J. Phys. Chem. B, 105(4):743–746, 2001.
F. Ohnesorge and G. Binnig. True atomic resolution by atomic force microscopy through repulsive and attractive forces. Science, 260:1451–1456, 1993.
D. J. Muller, D. Fotiadis, and A. Engel. Mapping flexible protein domains at subnanometer resolution with the atomic force microscope. FEBS Lett., 430(1–2 Special Issue SI):105–111, 1998.
D. J. Muller, D. Fotiadis, S. Scheuring, S. A. Muller, and A. Engel. Electrostatically balanced subnanometer imaging of biological specimens by atomic force microscope. Biophys. J., 76(2):1101–1111, 1999.
R. B. Marcus, T. S. Ravi, T. Gmitter, K. Chin, D. Liu, W. J. Orvis, D. R. Ciarlo, C. E. Hunt, and J. Trujillo. Formation of silicon tips with < 1 nm radius. Appl. Phys. Lett., 56(3):236–238, 1990.
S. Akamine, R. C. Barrett, and C. F. Quate. Improved atomic force microscope images using microcantilevers with sharp tips. Appl. Phys. Lett., 57(3):316–318, 1990.
T. Ichihashi and S. Matsui. In situ observation on electron beam induced chemical vapor deposition by transmission electron microscopy. J. Vac. Sci. Technol. B, 6(6):1869–1872, 1988.
D. J. Keller and C. Chih-Chung. Imaging steep, high structures by scanning force microscopy with electron beam deposited tips. Surf. Sci., 268:333–339, 1992.
K. I. Schiffmann. Investigation of fabrication parameters for the electron-beam-induced deposition of contamination tips used in atomic force microscopy. Nanotechnology, 4:163–169, 1993.
J. H. Hafner, C. L. Cheung, A. T. Woolley, and C. M. Lieber. Structural and functional imaging with carbon nanotube afm probes. Prog. Biophys. Mol. Biol., 77(1):73–110, 2001.
M. M. J. Treacy, T. W. Ebbesen, and J. M. Gibson. Exceptionally high young’s modulus observed for individual carbon nanotubes. Nature, 381:678–680, 1996.
A. Krishnan, E. Dujardin, T. W. Ebbesen, P. N. Yianilos, and M. M. J. Treacy. Young’s modulus of single-walled nanotubes. Phys. Rev. B, 58(20):14013–14019, 1998.
E. W. Wong, P. E. Sheehan, and C. M. Lieber. Nanobeam mechanics — elasticity, strength, and toughness of nanorods and nanotubes. Science, 277(5334):1971–1975, 1997.
J. P. Lu. Elastic properties of carbon nanotubes and nanoropes. Phys. Rev. Lett., 79(7):1297–1300, 1997.
S. Iijima, C. Brabec, A. Maiti, and J. Bernholc. Structural flexibility of carbon nanotubes. J. Chem. Phys., 104(5):2089–2092, 1996.
H. J. Dai, J. H. Hafner, A. G. Rinzler, D. T. Colbert, and R. E. Smalley. Nanotubes as nanoprobes in scanning probe microscopy. Nature, 384(6605):147–150, 1996.
A. G. Rinzler, Y. H. Hafner, P. Nikolaev, L. Lou, S. G. Kim, D. Tomanek, D. T. Colbert, and R. E. Smalley. Unraveling nanotubes: Field emission from atomic wire. Science, 269:1550, 1995.
H. Nishijima, S. Kamo, S. Akita, Y. Nakayama, K. I. Hohmura, S. H. Yoshimura, and K. Takeyasu. Carbon-nanotube tips for scanning probe microscopy: Preparation by a controlled process and observation of deoxyribonucleic acid. Appl. Phys. Lett., 74(26):4061–4063, 1999.
S. S. Wong, A. T. Woolley, T. W. Odom, J. L. Huang, P. Kim, and D. V. Vezenov, C. M. Lieber. Single-walled carbon nanotube probes for high-resolution nanostructure imaging. Appl. Phys. Lett., 73(23):3465–3467, 1998.
J. H. Hafner, M. J. Bronikowski, B. R. Azamian, P. Nikolaev, A. G. Rinzler, D. T. Colbert, K. A. Smith, and R. E. Smalley. Catalytic growth of single-wall carbon nanotubes from metal particles. Chem. Phys. Lett., 296(1–2):195–202, 1998.
P. Nikolaev, M. J. Bronikowski, R. K. Bradley, F. Rohmund, D. T. Colbert, K. A. Smith, and R. E. Smalley. Gas-phase catalytic growth of single-walled carbon nanotubes from carbon monoxide. Chem. Phys. Lett., 313(1–2):91–97, 1999.
W. Z. Li, S. S. Xie, L. X. Qian, B. H. Chang, B. S. Zou, W. Y. Zhou, R. A. Zhao, and G. Wang. Large-scale synthesis of aligned carbon nanotubes. Science, 274(5293):1701–1703, 1996.
J. H. Hafner, C. L. Cheung, and C. M. Lieber. Growth of nanotubes for probe microscopy tips. Nature, 398(6730):761–762, 1999.
V. Lehmann. The physics of macroporous silicon formation. Thin Solid Films, 255:1–4, 1995.
F. Ronkel, J. W. Schultze, and R. Arensfischer. Electrical contact to porous silicon by electrodeposition of iron. Thin Solid Films, 276(1–2):40–43, 1996.
J. H. Hafner, C. L. Cheung, and C. M. Lieber. Direct growth of single-walled carbon nanotube scanning probe microscopy tips. J. Am. Chem. Soc., 121(41):9750–9751, 1999.
E. B. Cooper, S. R. Manalis, H. Fang, H. Dai, K. Matsumoto, S. C. Minne, T. Hunt, and C. F. Quate. Terabit-per-square-inch data storage with the atomic force microscope. Appl. Phys. Lett., 75(22):3566–3568, 1999.
E. Yenilmez, Q. Wang, R. J. Chen, D. Wang, and H. Dai. Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy. Appl. Phys. Lett., 80(12):2225–2227, 2002.
A. Stemmer, A. Hefti, U. Aebi, and A. Engel. Scanning tunneling and transmission electron microscopy on identical areas of biological specimens. Ultramicroscopy, 30(3):263, 1989.
R. Nicolaides, L. Yong, W. E. Packard, W. F. Zhou, H. A. Blackstead, K. K. Chin, J. D. Dow, J. K. Furdyna, M. H. Wei, R. C. Jaklevic, W. J. Kaiser, A. R. Pelton, M. V. Zeller, and J. J. Bellina. Scanning tunneling microscope tip structures. J. Vac. Sci. Technol. A, 6(2):445–447, 1988.
J. P. Ibe, P. P. Bey, S. L. Brandow, R. A. Brizzolara, N. A. Burnham, D. P. DiLella, K. P. Lee, C. R. K. Marrian, and R. J. Colton. On the electrochemical etching of tips for scanning tunneling microscopy. J. Vac. Sci. Technol. A, 8:3570–3575, 1990.
L. Libioulle, Y. Houbion, and J.-M. Gilles. Very sharp platinum tips for scanning tunneling microscopy. Rev. Sci. Instrum., 66(1):97–100, 1995.
A. J. Nam, A. Teren, T. A. Lusby, and A. J. Melmed. Benign making of sharp tips for stm and fim: Pt, Ir, Au, Pd, and Rh. J. Vac. Sci. Technol. B, 13(4):1556–1559, 1995.
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Hafner, J.H. (2005). Probes in Scanning Microscopies. In: Bhushan, B. (eds) Nanotribology and Nanomechanics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-28248-3_3
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DOI: https://doi.org/10.1007/3-540-28248-3_3
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