Abstract
We study by Transmission Electron Microscopy (TEM) in-situ selfassembled carbon nanotubes (CNTs) grown by the Hot Filament Chemical Vapor Deposition (HFCVD) process on silicon substrates used for electronic devices. We present the different methods we have developed for extracting CNTs and studying their interface with the substrate as they are observable by TEM.
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References
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FIAWOO, MF., LOISEAU, A., BONNOT, AM., IAIA, A., BOUCHIAT, V., THIBAULT, J. (2006). TEM SAMPLE PREPARATION FOR STUDYING THE INTERFACE CNTS-CATALYST-SUBSTRATE. In: Popov, V.N., Lambin, P. (eds) Carbon Nanotubes. NATO Science Series II: Mathematics, Physics and Chemistry, vol 222. Springer, Dordrecht. https://doi.org/10.1007/1-4020-4574-3_5
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DOI: https://doi.org/10.1007/1-4020-4574-3_5
Publisher Name: Springer, Dordrecht
Print ISBN: 978-1-4020-4572-1
Online ISBN: 978-1-4020-4574-5
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