Abstract
Technology platform is the key issue to accelerate the progress of N/MEMS. MUMPs is recognized as the first fabrication platform for MEMS. Many promising MEMS devices have been realized through the MUMPs platform. According the variety of MEMS devices, unique fabrication platform is unable to fulfill the requirements. Presently, other platforms such as SCREAM, SUMMIT, MPW, and CMOS-MEMS have been successfully explored or still under investigation. This presentation intends to introduce two fabrication platforms, named MOSBE and BELST, established in the Micro Devices laboratory of National Tsing Hua University. Moreover, various applications fabricated using these two platforms will also be presented.
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Fang, W., Hsieh, J., Lin, HY. (2006). Towards the Integration of Nano/Micro Devices Using MEMS Technology. In: Chuang, T.J., Anderson, P.M., Wu, M.K., Hsieh, S. (eds) Nanomechanics of Materials and Structures. Springer, Dordrecht. https://doi.org/10.1007/1-4020-3951-4_14
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DOI: https://doi.org/10.1007/1-4020-3951-4_14
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