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Techniques in the Design of Thermomechanical Microactuators

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MEMS/NEMS

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Abstract

The purpose of this chapter is to provide fundamental background for the design of thermomechanical microactuators. Actuation has been a particularly challenging aspect of microsystem development. Many actuation approaches used at the macro level, such as hydraulics, pneumatics, electric motors, internal combustion engines and turbines, are either too difficult to fabricate at the micro level or do not work well at that scale. Electrostatic attraction is one approach that has been widely used for actuation of microsystems; however, electrostatic actuators tend to have high voltage requirements and low output force capabilities. While electrostatic actuation is suitable for many applications, some systems require either lower voltages to be compatible with on-chip electronics or higher output forces.

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Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Brigham Young University, USA

    Larry L. Howell & Timothy W. McLain

  2. Sandia National Laboratories, USA

    Michael S. Baker

  3. L-3 Communications, USA

    Christian D. Lott

Authors
  1. Larry L. Howell
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  2. Timothy W. McLain
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  3. Michael S. Baker
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  4. Christian D. Lott
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Editor information

Editors and Affiliations

  1. University of California, Los Angeles, USA

    Cornelius T. Leondes

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© 2006 Springer Science+Business Media, Inc.

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Howell, L.L., McLain, T.W., Baker, M.S., Lott, C.D. (2006). Techniques in the Design of Thermomechanical Microactuators. In: Leondes, C.T. (eds) MEMS/NEMS. Springer, Boston, MA. https://doi.org/10.1007/0-387-25786-1_31

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