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Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices

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MEMS/NEMS

Abstract

This chapter first presents a concurrent collaborative design strategy for Micro-Electro-Mechanical Systems (MEMS). Then, it presents the development of a knowledge intensive approach and system to select suitable manufacturing processes and materials for MEMS devices a concurrent collaborative design environment. Fundamental issues on concurrent collaborative design for manufacturability of MEMS and MEMS manufacturing process and material selection such as concurrent collaborative design framework, manufacturing process and material hierarchies, and selection strategy are addressed. A fuzzy decision support scheme for multi-criteria decision-making problem is proposed for estimating, ranking and selecting possible manufacturing processes, materials and their combinations. Based on the client-knowledge server architecture and framework, a web-based prototype advisory system for MEMS manufacturing process and material selection, Web MEMS-MASS, is developed to help the designer find good processes and materials for MEMS devices. The system, as one of important parts of an advanced simulation and modeling tool for MEMS design, is a concept level process and material selection tool, which can be used as a standalone application or a Java applet via the web. The running sessions of the system are inter-linked with web pages of tutorials and reference pages to explain the facets, fabrication processes and material choices, and calculations and reasoning in selection are performed using process capability and material property data from a remote web-based database and interactive knowledge base that can be maintained and updated via the Internet. The use of the developed system including operation scenario, use support, and integration with an MEMS collaborative design system is presented. Finally, an illustration example is provided.

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Authors and Affiliations

  1. National Institute of Standards and Technology, USA

    Xuan F Zha

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  1. Xuan F Zha
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Editors and Affiliations

  1. University of California, Los Angeles, USA

    Cornelius T. Leondes

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Zha, X.F. (2006). Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices. In: Leondes, C.T. (eds) MEMS/NEMS. Springer, Boston, MA. https://doi.org/10.1007/0-387-25786-1_1

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