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Erosion of solid surface under irradiation by high-power submicrosecond ion beams

  • Proceedings of the XIX International Conference “Ion-Surface Interaction (ISI-2009)” (Zvenigorod, August 2009)
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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

The erosion of a solid surface under high-power pulsed ion beams is considered. The values of atom yield from an irradiated surface due to the evaporation are obtained by numerical simulation. The effect of beam parameters and target characteristics on atom emission intensity was investigated. The technological capabilities of high-power submicrosecond ion beams for solid surface etching are assessed.

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Authors and Affiliations

  1. Tomsk Polytechnic University, Tomsk, 634050, Russia

    O. M. Stepanova & V. P. Krivobokov

Authors
  1. O. M. Stepanova
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  2. V. P. Krivobokov
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Additional information

Original Russian Text © O.M. Stepanova, V.P. Krivobokov, 2010, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2010, Vol. 74, No. 2, pp. 139–142.

The article was translated by the authors.

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Stepanova, O.M., Krivobokov, V.P. Erosion of solid surface under irradiation by high-power submicrosecond ion beams. Bull. Russ. Acad. Sci. Phys. 74, 122–125 (2010). https://doi.org/10.3103/S106287381002005X

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  • DOI: https://doi.org/10.3103/S106287381002005X

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