Skip to main content
SpringerLink
Log in

Multilayer thin-film filters of extreme ultraviolet and soft X-ray spectral regions

  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

Multilayer thin-film filters from different materi al pairs with spectral windows within the wavelength range 7n < 60 nm were developed. Optical characteristics of samples in the extreme ultraviolet, visible, and IR spectrum ranges were studied. Ultrathin freestanding Zr/Si large-aperture filters with transparencies up to 76% at 7n = 13 nm were manufactured for projection lithography test benches; variations in their properties during long-term thermal loads were studied.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Mitrofanov, A.V. and Tokarchuk, D.N., Nuc l. Instr. Meth. A, 1989, vol. 282, p. 546.

    Article  ADS  Google Scholar 

  2. Powell, F.R. and Johnson, T.A., Proc. SPIE, 2001, vol. 4343, p. 585.

    Article  ADS  Google Scholar 

  3. Andreev, S.S., Zuev, S.Yu., Klyuenkov, E.B., et al., Poverkhnost’. Rentgen., Sinkhrotron. i Neitron. Issled., 2003, no. 2, p. 6.

    Google Scholar 

  4. Andreev, S.S., Bibishkin, M.S., Kimura, H., et al., Izv. Akad. Nauk, Ser. Fiz., 2004, vol. 68, no. 4, p. 565.

    Google Scholar 

  5. Andreev, S.S., Bibishkin, M.S., Chkhalo, N.I., et al., Nucl. Instr. Meth. A, 2005, vol. 543, p. 340.

    Article  ADS  Google Scholar 

  6. Bibishkin, M.S., Chehonadskih, D.P., Chkhalo, N.I., et al., Proc. SPIE, 2003, vol. 5401, p. 8.

    Article  ADS  Google Scholar 

  7. Bibishkin, M.S., Zuev, S.Yu., Klimov, A.Yu., et al., Materialy Simpoziuma “Nanofizika i nanoelektronika” (Proc. Symp. “Nanophysics and Nanoelectronics”), Nizhni Novgorod: IFM RAN, 2005, vol. 5, p. 497.

    Google Scholar 

  8. Bibishkin, M.S., Chkhalo, N.I., Gusev, S.A., et al., Proc. SPIE, 2008, vol. 7025, p. 702502.

    Article  Google Scholar 

  9. Borozdin, Yu.E., Kazakov, E.D., Luchin, V.I., et al., Pis’ma v Zh. Eksperim. Teoret. Fiz., 2008, vol. 87, no. 1, p. 33 [JETPLett., (Engl. Transl.), 2008, vol. 87, no. 1, p.27].

    Google Scholar 

  10. Ragozin, E.N., Pirozhkov, A.S., Yogo, A., et al., Rev. Sci. Instrum., 2006, vol. 77, p. 123302.

    Article  ADS  Google Scholar 

  11. Kuzin, S.V., Zhitnik, I.A., Bugaenko, O.I., et al., Izv. Akad. Nauk, Ser. Fiz., 2005, vol. 69, no. 2, p. 191.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute for the Physics of Microstructures, Russian Academy of Sciences, Nizhni Novgorod, 603950, Russia

    B. A. Volodin, S. A. Gusev, M. N. Drozdov, S. Yu. Zuev, E. B. Klyuenkov, A. Ya. Lopatin, V. I. Luchin, A. E. Pestov, N. N. Salashchenko, N. N. Tsybin & N. I. Chkhalo

Authors
  1. B. A. Volodin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. A. Gusev
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. N. Drozdov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. S. Yu. Zuev
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. E. B. Klyuenkov
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. A. Ya. Lopatin
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. V. I. Luchin
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. A. E. Pestov
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. N. N. Salashchenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. N. N. Tsybin
    View author publications

    You can also search for this author in PubMed Google Scholar

  11. N. I. Chkhalo
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to B. A. Volodin.

Additional information

Original Russian Text © B.A. Volodin, S.A. Gusev, M.N. Drozdov, S.Yu. Zuev, E.B. Klyuenkov, A.Ya. Lopatin, V.I. Luchin, A.E. Pestov, N.N. Salashchenko, N.N. Tsybin, N.I. Chkhalo, 2010, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2010, Vol. 74, No. 1, pp. 53-57.

About this article

Cite this article

Volodin, B.A., Gusev, S.A., Drozdov, M.N. et al. Multilayer thin-film filters of extreme ultraviolet and soft X-ray spectral regions. Bull. Russ. Acad. Sci. Phys. 74, 46–49 (2010). https://doi.org/10.3103/S1062873810010120

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.3103/S1062873810010120

Keywords

Search

Navigation