Abstract
It is found that during glow-discharge nitriding, the flow bombarding the surface contains fast neutral particles that play a significant role in realization of the process along with charged particles.
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References
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Original Russian Text © I.M. Pastukh, 2013, published in Zhurnal Tekhnicheskoi Fiziki, 2013, Vol. 83, No. 8, pp. 144–147.
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Pastukh, I.M. Neutral components in glow-discharge nitriding. Tech. Phys. 58, 1228–1230 (2013). https://doi.org/10.1134/S1063784213080203
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DOI: https://doi.org/10.1134/S1063784213080203