Skip to main content
SpringerLink
Log in

AES and XPS studies of a por-Si/SnOx nanocomposite formed using a powerful ion beam of nanosecond duration

  • Published:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques Aims and scope Submit manuscript

Abstract

The results of the X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), and scanning electron microscopy (SEM) investigations of tin-oxide nanolayers on samples of por-Si/SnO x composites with varying matrix porosity, formed using a powerful ion beam of nanosecond duration, are presented. It is shown that rapid melting and crystallization of the surface leads to the formation of Si nanoparticles with a maximal size of 200 nm. It is established that tin is included in the structure of the nanocomposite in an oxidized state with a small inclusion of metallic β tin. With increasing porosity, the phase composition of the tin nanolayers becomes closer to the state corresponding to the highest tin oxide (SnO2). It is also shown that, upon an increase in the porosity, the intensity of the tin 4d subvalent line increases, which is, apparently, associated with an enhanced degree of hybridization of tin and oxygen atoms. The changes in the elemental composition of the composite and the depth of tin penetration are estimated from the results of ion etching.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. S. Borini, J. Appl. Phys. 102(093), 709 (2007).

    Google Scholar 

  2. G. Amato, L. Boarino, and F. Bellotti, Appl. Phys. Lett. 85, 4409 (2004).

    Article  CAS  Google Scholar 

  3. Z. Gaburro, C. J. Oton, L. Pavesi, and L. Pancheri, Appl. Phys. Lett. 84, 4388 (2004).

    Article  CAS  Google Scholar 

  4. H. Meixner and U. Lampe, Sensors Actuat. B 33, 198 (1996).

    Article  Google Scholar 

  5. K. Kalantar-zadeh and B. Fry, Nanotechnology-Enabled Sensors (Springer Science+Business Media, New York, 2008).

    Book  Google Scholar 

  6. V. V. Bolotov, Yu. A. Sten’kin, N. A. Davletkil’deev, et al., Semiconductors 43, 92 (2009).

    Article  CAS  Google Scholar 

  7. V. V. Bolotov, P. M. Korusenko, S. N. Nesov, S. N. Povoroznyuk, et al., Semiconductors 45, 693 (2011).

    Article  CAS  Google Scholar 

  8. V. V. Bolotov, V. S. Kovivchak, A. A. Korepanov, et al., J. Surf. Invest. 5, 1185 (2011).

    Article  CAS  Google Scholar 

  9. V. S. Kovivchak and N. A. Davletkil’deev, Tech. Phys. Lett. 35, 446 (2009).

    Article  CAS  Google Scholar 

  10. C. D. Wagner, W. M. Riggs, L. E. Davis, and J. F. Moulder, Handbook of X-Ray Photoelectron Spectroscopy (PEI, Minnesota, 1986), p. 185.

    Google Scholar 

  11. V. I. Troyan, M. A. Pushkin, V. N. Tronin, and V. D. Borman, in Physical Principles of Methods of Nanostructures and Solid Surface Study (Mosk. Inzh. Fiz. Inst., Moscow, 2008) [in Russian].

    Google Scholar 

  12. Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, Ed. by D. Briggs and M. Seah (Wiley, New York, 1983).

    Google Scholar 

  13. E. P. Domashevskaya, S. V. Ryabtsev, S. Yu. Turishchev, et al., Kondens. Sredy Mezhfazn. Granitsy 10(2), 98 (2008).

    Google Scholar 

  14. http://www.lasurface.com/database/elementxps.php.

  15. http://srdata.nist.gov/xps/EnergyTypeValSrch.aspx

  16. L. E. Davis, N. C. MacDonald, P. W. Palmberg, G. E. Riach, and R. E. Weber, in Handbook of Auger Electron Spectroscopy (PEI, Minnesota, 1986), p. 142.

    Google Scholar 

  17. G. Hoflund and D. Asbury, Thin Solid Films 129, 139 (1985).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Pyataya Kordnaya ul. 29, Omsk, 644018, Russia

    V. V. Bolotov, E. V. Knyazev, V. S. Kovivchak, A. A. Korepanov, P. M. Korusenko, S. N. Nesov & S. N. Porovoznyuk

Authors
  1. V. V. Bolotov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. V. Knyazev
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. S. Kovivchak
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. A. Korepanov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. P. M. Korusenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. S. N. Nesov
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. S. N. Porovoznyuk
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to P. M. Korusenko.

Additional information

Original Russian Text © V.V. Bolotov, E.V. Knyazev, V.S. Kovivchak, A.A. Korepanov, P.M. Korusenko, S.N. Nesov, S.N. Porovoznyuk, 2013, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2013, No. 1, pp. 66–70.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bolotov, V.V., Knyazev, E.V., Kovivchak, V.S. et al. AES and XPS studies of a por-Si/SnOx nanocomposite formed using a powerful ion beam of nanosecond duration. J. Surf. Investig. 7, 62–66 (2013). https://doi.org/10.1134/S1027451013010060

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1027451013010060

Keywords

Search

Navigation