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Energy spectra of ions and the energy dependence of the degree of ionization of atoms emitted from metals in a nonlinear sputtering mode

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Abstract

Analytical formulas have been obtained for the energy spectrum F +(E) of atomic ions and the energy dependence of the degree of ionization α+(E) of atoms sputtered from metals in the nonlinear collision cascade mode. The comparison of the dependences α+(E) for the linear and nonlinear sputtering modes indicates a significant difference between the mechanisms responsible for the formation of the charge composition of atomic ions.

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Authors and Affiliations

  1. MATI Russian State Technological University, ul. Orshanskaya 3, Moscow, 121552, Russia

    S. F. Belykh & A. A. Lozovan

  2. Centre for Physics and Technological Research (CeFITec), Dept. de Fisica da Faculdade de Ciencias e Tecnologia, Universidade Nova de Lisboa, Campus de Caparica, 2829-516, Caparica, Portugal

    A. B. Tolstoguzov

  3. Ryazan State Radioengineering University, ul. Gagarina 59/1, Ryazan, 390005, Russia

    A. B. Tolstoguzov

Authors
  1. S. F. Belykh
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  2. A. B. Tolstoguzov
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  3. A. A. Lozovan
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Correspondence to S. F. Belykh.

Additional information

Original Russian Text © S.F. Belykh, A.B. Tolstoguzov, A.A. Lozovan, 2015, published in Pis’ma v Zhurnal Eksperimental’noi i Teoreticheskoi Fiziki, 2015, Vol. 101, No. 9, pp. 712–716.

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Belykh, S.F., Tolstoguzov, A.B. & Lozovan, A.A. Energy spectra of ions and the energy dependence of the degree of ionization of atoms emitted from metals in a nonlinear sputtering mode. Jetp Lett. 101, 638–642 (2015). https://doi.org/10.1134/S0021364015090064

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  • DOI: https://doi.org/10.1134/S0021364015090064

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