Abstract
A schematic diagram of the unit is described. A method for connecting thermocouples in the vacuum chamber of the ion collector of the ILU-3 accelerator, taking the “cold end” temperature into account, is proposed. The maximal stabilization temperature of the furnace table in the high-temperature ion collector is 800°C, and the minimal stabilization temperature depends on implantation modes. The temperature control accuracy is ±3°C.
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Original Russian Text © V.I. Nuzhdin, V.F. Valeev, D.A. Konovalov, G.G. Gumarov, 2014, published in Pribory i Tekhnika Eksperimenta, 2014, No. 6, pp. 112–116.
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Nuzhdin, V.I., Valeev, V.F., Konovalov, D.A. et al. A unit for measuring and stabilizing the temperatures of the furnace table of the high-temperature ion collector in the ILU-3 accelerator. Instrum Exp Tech 57, 760–764 (2014). https://doi.org/10.1134/S0020441214050170
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DOI: https://doi.org/10.1134/S0020441214050170