Abstract
Ti–Al–Mo–N coatings have been grown by arc PVD at different bias voltages, V b, applied to the substrate and partial pressures of nitrogen reaction gas, p(N2), in the working chamber. The coatings have a nanocrystalline structure, with an average grain size on the order of 30–40 nm and a layered architecture made up of alternating layers based on a (Ti,Al)N nitride and Mo-containing phases of thickness comparable to the grain size. It has been shown that the phase composition of the coatings depends on V b and p(N2): raising the energy of deposited ions by increasing V b from–120 to–140 V, as well as raising p(N2) from 0.3 to 0.5 Pa, leads to a more complete molybdenum nitride formation during coating growth, which causes a transition from (Ti,Al)N–Mo–Mo2N compositions to (Ti,Al)N–Mo2N. Measurements of the binding energy of Mo 3d photoelectrons in metallic Mo and the Mo2N nitride by X-ray photoelectron spectroscopy have shown that the transition from the former phase to the latter is accompanied by a negligible energy shift.
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Original Russian Text © V.S. Sergevnin, I.V. Blinkov, D.S. Belov, A.O. Volkhonskii, E.A. Skryleva, A.V. Chernogor, 2016, published in Neorganicheskie Materialy, 2016, Vol. 52, No. 7, pp. 793–800.
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Sergevnin, V.S., Blinkov, I.V., Belov, D.S. et al. Phase formation in the Ti–Al–Mo–N system during the growth of adaptive wear-resistant coatings by arc PVD. Inorg Mater 52, 735–742 (2016). https://doi.org/10.1134/S002016851607013X
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DOI: https://doi.org/10.1134/S002016851607013X