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Technology of manufacturing micropixel avalanche photodiodes and a compact matrix on their basis

  • Methods of Physical Experiment
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Abstract

A technology for manufacturing a new micropixel avalanche photodiode (MAPD) with deeply buried pixels (including two epitaxial layers between which an array of n +) regions is formed by ionic doping) is described. A new method for manufacturing the compact MAPD matrices with minimum dead zone is proposed.

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References

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Authors and Affiliations

  1. Joint Institute for Nuclear Research, Dubna, Moscow oblast, Russia

    Z. Sadygov, F. Akhmedov, N. Anfimov, T. Bokova, A. Ol’shevskii, A. Sadygov, V. Chalyshev & M. Troitskaya

  2. Institute of Physics, Azerbaijan National Academy of Sciences, Baku, Republic of Azerbaijan

    Z. Sadygov & A. Dovlatov

  3. Institute for Nuclear Research, Russian Academy of Sciences, Moscow, Russia

    I. Zheleznykh

  4. Dukhov All-Russia Research Institute of Automatics, Moscow, Russia

    A. Titov

  5. Institute of Radiation Problems, Azerbaijan National Academy of Sciences, Baku, Republic of Azerbaijan

    F. Akhmedov, R. Mekhtieva & A. Sadygov

  6. Zecotek Photonics Pte, Ltd., Singapore, Singapore

    A. Ariffin & F. Zerrouk

Authors
  1. Z. Sadygov
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  2. A. Ariffin
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  3. F. Akhmedov
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  4. N. Anfimov
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  5. T. Bokova
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  6. A. Dovlatov
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  7. I. Zheleznykh
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  8. F. Zerrouk
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  9. R. Mekhtieva
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  10. A. Ol’shevskii
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  11. A. Sadygov
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  12. A. Titov
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  13. V. Chalyshev
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  14. M. Troitskaya
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Additional information

Original Russian Text © Z. Sadygov, A. Ariffin, F. Akhmedov, N. Anfimov, T. Bokova, A. Dovlatov, I. Zheleznykh, F. Zerrouk, R. Mekhtieva, A. Ol’shevskii, A. Sadygov, A. Titov, V. Chalyshev, M. Troitskaya, 2014, published in Pis’ma v Zhurnal Fizika Elementarnykh Chastits i Atomnogo Yadra, 2014, No. 1(185), pp. 105–110.

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Sadygov, Z., Ariffin, A., Akhmedov, F. et al. Technology of manufacturing micropixel avalanche photodiodes and a compact matrix on their basis. Phys. Part. Nuclei Lett. 10, 780–782 (2013). https://doi.org/10.1134/S154747711401018X

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  • DOI: https://doi.org/10.1134/S154747711401018X

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