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Acoustic resonators with a commercial ring

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Unreleased acoustic resonators fabricated in commercial fin-field-effect-transistor technology could be used in multigigahertz signal processing.

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Fig. 1: Unreleased CMOS FinFET resonators with phononic acoustic energy confinement.

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Authors and Affiliations

  1. Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan

    Ming-Huang Li

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  1. Ming-Huang Li
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Correspondence to Ming-Huang Li.

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The author declares no competing interests.

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Li, MH. Acoustic resonators with a commercial ring. Nat Electron 5, 545–546 (2022). https://doi.org/10.1038/s41928-022-00837-4

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